基于LabVIEW软件平台的质量流量控制器（MFC）老化与检测系统

发布时间：2018-05-03 11:47

本文选题：质量流量控制器 + 老化　；参考：《北京工业大学》2016年硕士论文

【摘要】：质量流量控制器(Mass Flow Controller,缩写为MFC)自成功研发生产以来,主要用于测量和控制气体的质量流量,其测量值不随着压力或温度的波动而失准。目前,它已越来越多的被应用于半导体、光伏太阳能、燃料电池、真空等高精尖领域。随着科技的不断发展,特别是通信技术的发展和应用,许多新兴行业都使用质量流量控制器作为控制气体的装置,个别行业对气体测量和控制的精准度要求更是使其成为了核心零部件。随着MFC的应用越来越广泛,重要性不断提升,用户对其生产厂商的产品可靠性要求也与日俱增,在工业应用中一旦发生故障,将造成一系列不良后果,因此,MFC生产厂商在产品出厂前对其进行老化筛选以剔除产品的早期故障是非常必要的。本课题设计开发了一套基于LabVIEW(Laboratory Virtual Instrument Engineering Workbench)软件平台的质量流量控制器老化控制检测系统,用于对MFC产品的部件进行老化与检测,通过疲劳试验、加速老化与在线检测,剔除早期失效,从而大幅提高产品的可靠性。结合软件控制方式,能够帮助企业大幅提升老化筛选效率与判断准确性,降低人工成本。本文介绍了质量流量控制器和虚拟仪器技术的国内外研究现状,以及MFC检测设备的国内外研究现状,分析了MFC的工作原理和失效机理,得出了本老化检测系统的设计方案和结构模型。重点研究了使用虚拟仪器技术实现系统软硬件的结合,利用LabVIEW平台进行系统上位机软件开发,软件采用模块化设计,包括采集模块、控制模块、显示模块和数据处理模块,可实现自动采集和分析数据,多通道多信号同时发生,实现自动化控制与在线检测,建立起了一个具备实时性、自动化、高效率的老化监控系统。文章最后是系统的应用测试,给出了测试结论与有待改进的地方。
[Abstract]:Mass Flow controller has been used to measure and control the mass flow rate of gas since it was successfully developed and produced, and its measurement value is not inaccurate with the fluctuation of pressure or temperature. At present, it has been more and more used in semiconductor, photovoltaic solar, fuel cells, vacuum and other sophisticated fields. With the development of science and technology, especially the development and application of communication technology, many new industries use mass flow controller as the device to control gas. The precision of gas measurement and control in individual industries makes it a core component. As the application of MFC is more and more extensive and the importance is increasing, the requirement of product reliability for its manufacturers is also increasing, once it breaks down in industrial application, it will cause a series of adverse consequences. Therefore, it is very necessary for MFC manufacturers to screen the products before they leave the factory to eliminate the early faults of the products. In this paper, a mass flow controller aging control system based on LabVIEW(Laboratory Virtual Instrument Engineering Workbench) software platform is designed and developed, which is used for the aging and detection of MFC components. Through fatigue tests, the aging and on-line testing are accelerated. Eliminate early failures, thereby greatly improving the reliability of the product. Combined with software control, it can greatly improve the efficiency and accuracy of aging screening and reduce labor cost. This paper introduces the research status of mass flow controller and virtual instrument technology at home and abroad, and the research status of MFC detection equipment at home and abroad. The working principle and failure mechanism of MFC are analyzed. The design scheme and structure model of the aging detection system are obtained. The combination of software and hardware using virtual instrument technology is studied emphatically. The software is developed by using LabVIEW platform. The software is designed by modularization, including acquisition module, control module, display module and data processing module. It can automatically collect and analyze data, multi-channel and multi-signal occur simultaneously, realize automatic control and on-line detection, and set up an aging monitoring system with real-time, automation and high efficiency. At the end of the paper, the application test of the system is given, and the test conclusion and the place to be improved are given.
【学位授予单位】：北京工业大学
【学位级别】：硕士
【学位授予年份】：2016
【分类号】：TP311.52

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