微颗粒的三维空间跨尺度装配方法

发布时间：2018-06-29 07:54

本文选题：微颗粒 + 微夹持　；参考：《光学精密工程》2017年01期

【摘要】：针对微颗粒空间装配的问题,以外径为十几微米的微颗粒与外径为几百微米的柱腔装配为研究对象,开展微颗粒空间跨尺度装配方法研究。首先,针对微颗粒受到基底表面作用力影响不易被拾取与释放的问题,分析了微颗粒的受力情况,设计了真空吸附式微夹持器用于微颗粒的拾取与释放;然后,针对由于微颗粒与柱腔的尺寸跨度大,很难实现装配过程中二者空间位置实时监测的问题,设计了具有多维视觉监测功能的微装配机器人并且建立了多维视觉监测模型,实现微颗粒与柱腔装配过程的在线监测;最后,提出了基于多维视觉监测模型的微颗粒与柱腔空间半自动装配方法。实验结果证明了所提方法的有效性,并且实现了将外径为20μm的微颗粒放入外径为200μm的柱腔内的目标。该方法适用于微机电系统制造中微颗粒的三维空间装配。
[Abstract]:In order to solve the problem of micro-particle spatial assembly, the cross-scale assembly method of micro-particle space was studied by taking micro-particle with outer diameter of 10 microns and cylindrical cavity with external diameter of several hundred microns as the research object. Firstly, aiming at the problem that the microparticles are not easy to be picked up and released by the influence of the surface force on the substrate, the stress of the microparticles is analyzed, and the vacuum adsorption microgripper is designed to pick up and release the microparticles. Due to the large size span of micro particle and column cavity, it is difficult to realize real time monitoring of their space position in assembly process. A micro assembly robot with multi dimensional vision monitoring function is designed and a multi dimensional visual monitoring model is established. Finally, a semi-automatic assembly method of micro-particle and column cavity is proposed based on multi-dimensional visual monitoring model. The experimental results show that the proposed method is effective, and the goal of putting 20 渭 m microparticles into the column cavity with 200 渭 m outer diameter is achieved. This method is suitable for three-dimensional assembly of micro-particles in MEMS manufacturing.
【作者单位】：中国工程物理研究院激光聚变研究中心;
【基金】：中国工程物理研究院科学技术发展基金资助项目(No.2014B0403066);中国工程物理研究院超精密加工技术重点实验室基金资助项目(No.ZZ14003)
【分类号】：TP391.41;TP242

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