印章式有机气相喷印系统设计

发布时间：2018-04-27 02:08

本文选题：有机器件 + 发光层　；参考：《华中科技大学》2014年硕士论文

【摘要】：有机电致发光显示技术是一种极具发展前景的显示技术，具有宽视角、高分辨率、可实现柔性显示等特征。目前，大尺寸有机电致发光显示器的制造存在两大挑战：其一是有机层精密图形化的问题，其二是大面积显示器生产过程中的成品率问题。由此，本文提出了一种印章式有机气相喷印成膜技术和装备。该技术以惰性气体为载气携带高温有机蒸汽经由图形化喷嘴喷射并在基板上冷却沉积成型。一次喷印即可完成整个有机层图形化的制作。首先，基于流体力学、空气动力学、分子动力学和传热学等理论，按照喷印发生的整个过程，分别建立了惰性载气夹带有机气体过程、混合气体在管道内的输送过程、混合气体经图形化喷嘴喷出形成射流过程和有机材料在基板沉积过程的数学模型。并在理论上预测了各个控制参数对沉积形貌的影响。其次，以理论分析为基础，搭建起了整个有机气相喷印系统。该系统由温度控制模块、基板冷却控制模块、气体压力和环境氛围控制模块、三维旋转运动平台模块、图像采集与间隙检测模块以及软件控制模块组成。并使用硅微加工工艺制作了图形化硅喷嘴。然后，利用该有机气相喷印系统以AL为有机原料，使用单孔硅喷嘴实验研究了有机喷印沉积的工作原理和具体过程。分析了喷嘴直径、蒸发腔温度、基板温度、载气驱动压力、基板与喷嘴间距、电磁阀开启时间和基板扫描速度等控制参数对喷印图形尺寸的影响。最后，分别使用单孔喷嘴逐点喷射和逐线扫描的方式以及方孔喷嘴和阵列喷嘴一次喷印成型的方式制作了形状较好，位置精度较高的点阵、等距线条等简单有机图形。
[Abstract]:Organic electroluminescent display (OLED) is a promising display technology with wide angle of view, high resolution and flexible display. At present, there are two major challenges in the manufacture of large scale organic electroluminescent displays: one is the precision graphics of organic layer, the other is the yield of large area displays. Therefore, a seal-type organic vapor-phase spray film forming technology and equipment is proposed in this paper. The technology uses inert gas as carrier gas to carry high temperature organic vapor via graphical nozzle jet and cooling deposition on substrate. One spray printing can complete the entire organic layer graphical production. Firstly, based on the theories of hydrodynamics, aerodynamics, molecular dynamics and heat transfer, according to the whole process of jet printing, the process of entrainment of organic gas with inert carrier gas and the transportation process of mixed gas in pipeline are established respectively. A mathematical model of jet process and organic material deposition on substrate was developed by the injection of mixed gases through graphical nozzles. The influence of various control parameters on the deposition morphology is predicted theoretically. Secondly, based on the theoretical analysis, the whole organic vapor jet printing system is built. The system consists of temperature control module, substrate cooling control module, gas pressure and ambient atmosphere control module, three-dimensional rotation motion platform module, image acquisition and clearance detection module and software control module. The graphical silicon nozzle is fabricated by silicon micromachining technology. Then, the working principle and concrete process of organic spray deposition were studied by using single hole silicon nozzle with AL as organic raw material in the organic vapor spray printing system. The effects of nozzle diameter, evaporation chamber temperature, substrate temperature, carrier gas driving pressure, the distance between substrate and nozzle, the opening time of solenoid valve and the scanning speed of substrate on the size of printing pattern were analyzed. Finally, the single hole nozzle point by point injection and line by line scanning mode and the square hole nozzle and array nozzle single jet molding method were used to make the simple organic graphics such as good shape, high position precision, equidistant lines and other simple organic graphics.
【学位授予单位】：华中科技大学
【学位级别】：硕士
【学位授予年份】：2014
【分类号】：TN873

【相似文献】