高精度硅微谐振加速度计频率测量输出电路
发布时间：2018-08-17 12:17
【摘要】：硅微谐振加速度计是一种频率输出的MEMS仪表,针对其差动频率输出的特点和对静态与动态高精度测试精度的要求,设计并实现了一种高精度频率输出电路,实现了差动频率的实时相减和静态与动态频率信号输出。对电路及仪表的精度进行了测试,测试结果表明,该电路稳定性可达到1×10-9,全温范围内(-40~+70℃)非线性优于1×10-7,频率分辨率可达到1×10-5,测试精度满足仪表系统精度要求,使仪表更满足工程应用的条件。根据实际工程应用要求,还对该电路提出了抗干扰设计,进一步提高了该电路的工程应用可靠性。
[Abstract]:Silicon microresonant accelerometer is a frequency output MEMS instrument. According to the characteristics of its differential frequency output and the requirement of static and dynamic high precision measurement precision, a high precision frequency output circuit is designed and implemented. Real-time subtraction of differential frequency and output of static and dynamic frequency signals are realized. The accuracy of the circuit and the instrument is tested. The test results show that the stability of the circuit can reach 1 脳 10 ~ (-9), the nonlinearity is better than 1 脳 10 ~ (-7) and the frequency resolution can reach 1 脳 10 ~ (-5) in the full temperature range (-40 ~ 70 鈩，
本文编号：2187602
[Abstract]:Silicon microresonant accelerometer is a frequency output MEMS instrument. According to the characteristics of its differential frequency output and the requirement of static and dynamic high precision measurement precision, a high precision frequency output circuit is designed and implemented. Real-time subtraction of differential frequency and output of static and dynamic frequency signals are realized. The accuracy of the circuit and the instrument is tested. The test results show that the stability of the circuit can reach 1 脳 10 ~ (-9), the nonlinearity is better than 1 脳 10 ~ (-7) and the frequency resolution can reach 1 脳 10 ~ (-5) in the full temperature range (-40 ~ 70 鈩，
本文编号：2187602
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