基于微流控技术的高效液相脉冲激光烧蚀法

发布时间：2017-12-31 05:17

本文关键词：基于微流控技术的高效液相脉冲激光烧蚀法　出处：《中国激光》2017年04期 　论文类型：期刊论文

【摘要】：液相脉冲激光烧蚀法(PLAL)具有绿色环保、适用范围广及可制备复合材料等优点,受到学术界的广泛关注,但是较低的制备效率限制了它进一步发展。将微流控技术与液相脉冲激光烧蚀法相结合,在硅基微流控芯片中实现了快速高效制备晶格型(400~800nm)和球型(100~300nm)硅纳米结构。通过扫描电子显微镜和光谱仪对其形貌结构及分布情况进行了测试表征,获得了微流控流速、激光烧蚀功率与纳米粒子制备效率之间的关系。该方法将液相脉冲激光烧蚀法的最高制备效率提高了30%以上,达到87.5mg/min,为将来液相脉冲激光烧蚀法工业化生产提供一种新的技术路线。
[Abstract]:Liquid pulse laser ablation (PLAL) has been widely concerned by academia for its advantages of environmental protection, wide application and preparation of composite materials. However, the low preparation efficiency limits its further development. The microfluidic technology is combined with the liquid pulse laser ablation method. The rapid and efficient fabrication of lattice type (400nm) and spherical type (100nm) in silicon-based microfluidic chips have been achieved. The morphology and distribution of silicon nanostructures were characterized by scanning electron microscopy (SEM) and spectrometer. The relationship between the microfluidic flow rate, laser ablation power and the preparation efficiency of nanocrystalline particles was obtained. The maximum preparation efficiency of the liquid pulse laser ablation method was increased by more than 30%. It can reach 87.5 mg / min, which provides a new technical route for industrial production of liquid pulse laser ablation in the future.
【作者单位】：吉林大学集成光电子学国家重点联合实验室吉林大学实验区;西安交通大学机械工程学院;
【基金】：国家自然科学基金(91423102,91323301,61605055,21473076)
【分类号】：TN249
【正文快照】： 1引言液相脉冲激光烧蚀法(PLAL)是一种绿色、简单的制备微纳米粒子的方法[1]。该方法利用脉冲激光对浸没在液体中的靶样品进行烧蚀,直接在液相环境中制备出微纳米粒子。它有着以下优点:一是可以使用水、乙醇等常见无毒的溶液作为反应环境和介质;二是极端局部环境可以允许各

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