测量—加工闭环控制的激光抛光聚晶金刚石工艺研究

发布时间：2018-01-14 04:06

本文关键词：测量—加工闭环控制的激光抛光聚晶金刚石工艺研究　出处：《应用激光》2017年02期 　论文类型：期刊论文

【摘要】：聚晶金刚石(PCD)坯料的传统平整加工工艺如机械磨削、电火花铣削、超声波磨削、激光铣削等,工艺流程为开环控制,难以达到超精密加工所要求的平整度和光洁度。将二维激光位移传感器与激光扫描振镜集成在同一加工头上,与XYZ三轴工作台配合,实现了在线测量PCD表面起伏形貌与自动分块激光扫描抛光的闭环工艺控制。研究了激光能量密度、光斑搭接率、扫描速度对抛光质量的影响。结果表明,较小的激光能量密度、80%光斑搭接率、扫描速度为100mm/s时,可获得最佳的抛光效果。经过4次闭环抛光后,PCD坯料表面粗糙度Ra由40.7μm降低到1.21μm,表面平面度由130μm降低到30μm,抛光精度与机械精磨相仿,测量-加工闭环控制具有显著的工程应用意义。
[Abstract]:Polycrystalline diamond (PCD) blank traditional smooth processing technology such as mechanical grinding, EDM milling, ultrasonic grinding, laser milling, process for open-loop control, to achieve ultra precision machining smoothness. The 2D laser displacement sensor and laser scanning mirror is integrated in the same processing head three, in conjunction with the XYZ axis platform, realizes the control of online measurement of PCD surface morphology and closed loop process automatic block scanning laser polishing. The research of laser energy density, spot overlap rate. The influence of scanning speed on polishing quality. The results show that the laser energy density is smaller, 80% overlapping rate, scanning speed 100mm/s, get the best polishing effect. After the 4 closed after polishing, PCD billet surface roughness Ra decreased from 40.7 m to 1.21 m, the flatness of the surface by 130 m reduced to 30 m, and the precision mechanical polishing The precision grinding is similar, and the closed loop control of measurement and processing has significant engineering significance.

【作者单位】：浙江省激光加工机器人重点实验室温州大学机电工程学院;
【基金】：国家自然科学基金资助项目(项目编号:51375348) 浙江省自然科学基金杰青团队资助项目(项目编号:LR15E050003) 温州市重点科技创新团队资助项目(项目编号:C20150006)
【分类号】：TN249
【正文快照】： 0引言聚晶金刚石(Polyerystazline Diamond,PCD)是由经过筛选的金刚石微粉与少量结合剂在高温高压下烧结而成的复合材料[1],具有熔点高、超硬耐磨、导热性好、化学性能稳定的特点,作为刀具、钻头拉丝模等广泛用于现代工业、国防和高新技术等领域[2]。PCD从坯料到刀具、钻头、

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