无自吸收效应的光学薄激光诱导击穿光谱研究与性能评估

发布时间：2018-01-16 23:10

本文关键词：无自吸收效应的光学薄激光诱导击穿光谱研究与性能评估　出处：《中国科学:物理学力学天文学》2017年12期 　论文类型：期刊论文

【摘要】：针对影响激光诱导击穿光谱(LIBS)定量分析精度的自吸收效应,发展了新型的光学薄激光诱导击穿光谱(OT-LIBS)技术,通过匹配等离子体光谱中元素双线强度比与理论值来设置曝光延时,从而直接由实验装置获得无自吸收的元素发射谱线,不仅避免了建模校正的误差,且未额外增加设备.通过对比Boltzmann平面的线性相关度以及自吸收(SA)系数,验证了OT-LIBS能够诱导产生光学薄等离子体.与传统的自吸收效应校正方法相比,OT-LIBS所获Boltzmann平面的线性相关度达到0.99,而且SA系数达到最大值,证明自吸收效应最小.单变量定标的定量分析结果表明,相比于传统LIBS,OT-LIBS将Al元素定标线的线性相关度由0.86提高至0.98,平均绝对测量误差由1.2%降低至0.13%,检测精度提高了一个量级.探讨了OT-LIBS的边界条件、适用性和局限性,该技术对Al元素含量和脉冲激光能量的限定范围分别为0 20.8%和大于16.9?mJ,对Al元素含量和脉冲激光能量的可适用范围分别为0 15.9%和大于33.1?mJ.本技术有助于进一步推动LIBS的工业化应用步伐.
[Abstract]:A novel optical thin laser induced breakdown spectroscopy (OT-LIBS) technique is developed for the self-absorption effect which affects the accuracy of laser induced breakdown spectroscopy (LIBS). By matching the two-line intensity ratio of elements in the plasma spectrum with the theoretical values, the exposure delay is set, and the emission lines without self-absorption are obtained directly from the experimental device, which not only avoids the error of modeling correction. By comparing the linear correlation of the Boltzmann plane and the self-absorption coefficient. It is verified that OT-LIBS can induce the generation of optical thin plasma, which is compared with the traditional self-absorption correction method. The linear correlation degree of Boltzmann plane obtained by OT-LIBS is 0.99, and the SA coefficient reaches the maximum, which proves that the self-absorption effect is the least. The quantitative analysis results of univariate calibration show that the self-absorption effect is the least. Compared with the traditional LIBS OT-LIBS, the linear correlation of the calibration line of Al is increased from 0.86 to 0.98, and the average absolute measurement error is reduced from 1.2% to 0.13%. The detection accuracy is improved by one order of magnitude. The boundary condition, applicability and limitation of OT-LIBS are discussed. The limiting range of Al content and pulsed laser energy is 0 20.8% and 16. 9? The applicable range for Al content and pulsed laser energy is 0 15.9% and more than 33. 1? This technology is helpful to further promote the industrial application of LIBS.
【作者单位】：山西大学激光光谱研究所山西大学量子光学与光量子器件国家重点实验室;山西大学极端光学协同创新中心;
【基金】：国家重点基础研究发展计划(编号:2017YFA0304203) 国家自然科学基金(编号:61775125,61475093,61378047,11434007) 长江学者和创新团队发展计划(编号:IRT13076) 山西省重大科技专项(编号:MD2016-01)资助项目
【分类号】：O53;TN24
【正文快照】： 1引言激光诱导击穿光谱(L a s e r-i n d u c e d B r e a k d o w n S p e c-t r o s c o p y,L I B S)是将高功率脉冲激光聚焦于样品表面,被烧蚀部位迅速融化气化形成高温等离子体,通过测量其发射光谱的特征得知样品的元素组分.L I B S可以分析元素周期表中几乎所有的元素,

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