氢分子束流引入对ECR氢等离子体中离子特征的影响

发布时间：2018-01-26 00:04

本文关键词： 氢等离子体离子特征碰撞过程电子回旋共振等离子体　出处：《真空科学与技术学报》2017年08期 　论文类型：期刊论文

【摘要】：利用质量能量分析仪研究了微波电子回旋共振(ECR)氢等离子体的离子特征以及氢分子束流引入对离子特征的影响。在工作气压1 Pa的放电条件下,探测到了H+、H_2~+和H_3~+三种氢离子,其中H_2~+为主要离子;随放电功率的增加,探测到的离子通量增加。维持氢气放电条件不变,在工作区引入微量的氢分子束流。在束流增加的初始阶段,电子-离子的复合反应增强,探测到的三种离子通量都减小;相对于高能离子,低能区的离子数显著减少;三种离子归一化后H_2~+相对含量增加,H_3~+相对含量减少,而H~+的相对含量基本不变;相对含量的变化与不同离子-分子间碰撞的差异有关。随着氢气束流进一步增加,各种离子相对含量趋于稳定。
[Abstract]:The ion characteristics of the microwave electron cyclotron resonance (ECR) hydrogen plasma and the influence of the introduction of hydrogen molecular beam on the ion characteristics were studied by mass energy analyzer. Three kinds of hydrogen ions have been detected, among which H _ 2H _ 2and H _ 3s ~ are the main ions. With the increase of the discharge power, the detected ion flux increases, the hydrogen discharge condition remains the same, and a small amount of hydrogen molecular beam is introduced into the working area. At the initial stage of the beam increase, the electron-ion recombination reaction is enhanced. The three ion fluxes detected were all decreased. Compared with high energy ions, the number of ions in low energy region was significantly reduced. After the normalization of the three kinds of ions, the relative content of H _ S _ 2 ~ increased and the relative content of H _ T decreased, while the relative content of H ~ was almost unchanged. The change of relative content is related to the difference of the collision between different ions and molecules. With the increase of hydrogen beam current, the relative contents of various ions tend to be stable.
【作者单位】：中国科学技术大学近代物理系;
【基金】：国家自然科学基金项目(批准号:11375192)
【分类号】：O539
【正文快照】： 在等离子体中分子碰撞过程起着基本的作用。分子-电子碰撞产生离子和电子,这是等离子体产生和维系的主要过程;此外,分子过程也是活性粒子形成的重要途径。氢气等离子体是一种被广泛关注的分子等离子体,在核聚变、等离子体材料处理等方面有着直接的应用[1-3];在天体物理学中,H+

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