常压高频等离子体电子温度的光谱法诊断

发布时间：2018-01-28 22:19

  本文关键词： 高频等离子体 发射光谱 电子温度　出处：《光谱学与光谱分析》2017年02期 　论文类型：期刊论文

【摘要】：常压高频等离子体由于其无电极污染、能量密度大、温度高及气氛可控的特点而得到了广泛应用,电子温度是影响其使用性能的关键参数,根据发射光谱使用玻尔兹曼图解法计算是最常用且最可行的诊断方法,但由于跃迁几率数据可靠性、环境背景、仪器误差、数据处理误差等原因,不同研究者根据不同谱线计算的结果通常不具有可比性。为了得到可靠性高的电子温度计算结果,针对存在SiO_2颗粒的常压高频空气等离子体,以光谱范围为200~1 077nm的7通道高分辨光纤光谱仪为测量工具,该研究讨论了元素、光谱段选择对计算结果可靠性的影响。结果表明,由于N_2占电离气体的主要部分且不参与化学反应,NⅠ发射谱线是最佳选择,使用738~940nm内NⅠ的谱线计算的拟合度为0.95,计算的电子温度最为可靠;由于Si和O极易结合成SiO_2颗粒,此二元素的能量不再满足玻尔兹曼分布,计算结果的可靠性较差,因此不能使用Si和O元素的发射谱线计算电子温度;使用掺入Ar的谱线同样不能得到可靠的电子温度计算结果。因此,为了有效诊断等离子体电子温度,在不同应用场合中,应当根据实际情况,合理选择测量光谱范围及光谱仪,选取合适的粒子及其发射谱线。
[Abstract]:Atmospheric high frequency plasma has been widely used because of its characteristics of no electrode pollution, high energy density, high temperature and controllable atmosphere. Electron temperature is the key parameter affecting its performance. Boltzmann method is the most commonly used and feasible diagnostic method according to the emission spectrum, but due to the reliability of transition probability data, environment background, instrument error, data processing error and so on. The results calculated by different researchers according to different spectral lines are usually not comparable. In order to obtain reliable results of electron temperature calculation, the atmospheric pressure high frequency air plasma with SiO_2 particles is used. Using a 7-channel high-resolution optical fiber spectrometer with a spectral range of 200 ~ 1077nm as a measuring tool, the influence of elements and spectral band selection on the reliability of the calculation results is discussed. Since NII is the main part of the ionized gas and does not take part in the chemical reaction, the N 鈪，

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