锗基InAs量子点激光器的腔面失效及再生的研究

发布时间：2018-02-21 19:14

本文关键词： 激光器灾变性光学镜面损伤选择性腐蚀腔面再生　出处：《半导体光电》2017年01期 　论文类型：期刊论文

【摘要】：围绕锗基InAs量子点激光器,开展了激光器腔面失效及再生的研究。研究并分析了灾变性光学镜面损伤产生的机理及其对激光器腔面的影响,开展了腔面再生研究,发展了一套创新性的腔面再生工艺并实现了失效的锗基InAs量子点激光器的再生。根据锗基InAs量子点激光器材料结构设计腐蚀工艺,通过选择性腐蚀在激光器腔面制备出悬臂结构,采用细针解理使悬臂结构自然解理,获得新的激光器谐振腔面,失效激光器重新工作。对比了激光器失效前和再生后的工作性能,结果表明因灾变性光学镜面损伤而失效的锗基InAs量子点激光器获得全新的谐振腔面,锗基激光器器件性能和失效前相当。
[Abstract]:The study on cavity surface failure and regeneration of germanium based InAs quantum dot laser is carried out. The mechanism of catastrophic optical mirror damage and its influence on laser cavity surface are studied. A set of innovative cavity surface regeneration technology has been developed and the regeneration of germanium based InAs quantum dot laser has been realized. According to the material structure of germanium based InAs quantum dot laser, corrosion process has been designed. The cantilever structure was fabricated by selective etching on the laser cavity surface. The cantilever structure was naturally cleavaged by fine needle cleavage, and a new laser resonator surface was obtained. The working performance of the laser before and after the laser failure is compared. The results show that the germanium based InAs quantum dot laser has a new resonator surface due to the damage of the optical mirror surface. The performance of germanium based laser device is similar to that before failure.
【作者单位】：中国科学院上海微系统与信息技术研究所;
【基金】：国家“973”计划项目(2014CB643902) 国家自然科学基金项目(61334004,61404152);国家自然科学基金创新群体项目(61321492)
【分类号】：TN248

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