基于PET基底透明屏蔽膜的制备研究

发布时间：2018-03-23 00:15

  本文选题：薄膜　切入点：透明屏蔽　出处：《光子学报》2017年04期 　论文类型：期刊论文

【摘要】：为满足光学器件透红外屏蔽电磁波的要求,在PET柔性基底上制作了金属网栅透明屏蔽膜.分析网栅参数对其屏蔽效率及透过率的影响,选取结构参数.针对PET基底的柔性特点及其热稳定性,经试验研究优化光刻工艺中的提拉速度、烘烤时间及温度等参数,从而得到高质量的图形结构.采用磁控溅射法制备透明屏蔽膜,通过优化溅射功率、溅射气压等参数使膜/基结合更牢固.最后得到线宽为3μm、周期为250μm的金属网栅透明屏蔽膜.采用分光光度计测得其在300~2 200nm波段的平均透过率为77%;采用屏蔽室法测得其在2~18GHz频段的电磁屏蔽效率为12dB以上.
[Abstract]:In order to meet the requirement of infrared shielding electromagnetic wave of optical devices, a metal grid transparent shielding film was fabricated on the flexible substrate of PET. The influence of grid parameters on the shielding efficiency and transmittance was analyzed. According to the flexibility and thermal stability of PET substrate, the parameters such as drawing speed, baking time and temperature in lithography were optimized by experiments. The transparent shielding film was prepared by magnetron sputtering, and the sputtering power was optimized. Finally, the transparent shielding film with 3 渭 m line width and a period of 250 渭 m was obtained. The average transmittance of the film in 300-2 200nm band was measured by spectrophotometer and measured by shielding chamber method. The electromagnetic shielding efficiency in 2~18GHz band is higher than 12dB.
【作者单位】： 长春理工大学光电工程学院;
【基金】：吉林省重大科技攻关专项(No.20140203002GX)资助~~
【分类号】：O441.4;TH74
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