基于叠层衍射成像的二元光学元件检测研究

发布时间：2018-04-28 08:05

本文选题：叠层衍射成像 + 二元光学元件　；参考：《物理学报》2017年09期

【摘要】：本文提出了一种基于叠层衍射成像(ptychography)的二元光学元件的检测方法,该方法可实现对二元光学元件表面微观轮廓的检测以及特征尺寸的标定.相比于传统的二元光学元件检测方法,其使用无透镜成像技术,简化了系统结构并可适用于特殊环境下的检测.该方法可直接通过采集多幅衍射图,利用叠层衍射成像迭代算法可精确地复原大尺寸待测元件的表面微观轮廓,提高大尺寸器件的检测效率.本文模拟仿真了台阶高度与噪声大小对纯相位台阶板复原结果的影响,并在光学实验中选取计算全息板为样品,复原样品的表面微观轮廓信息以及得到台阶高度.以白光干涉仪检测结果为标准,该方法在精度要求不太高的前提下,可获得令人满意的成像质量.
[Abstract]:In this paper, a detection method of binary optical elements based on stacked diffraction imaging is proposed. This method can detect the micro profile of the surface and calibrate the feature size of binary optical elements. Compared with the traditional binary optical element detection method, it uses lensless imaging technology, which simplifies the system structure and is suitable for detection in special environment. This method can directly collect multiple diffraction images and make use of the iterative algorithm of stacked diffraction imaging to accurately restore the microcosmic profile of the large size elements to be tested and improve the detection efficiency of the large scale devices. In this paper, the effects of step height and noise on the restoration results of pure phase step plate are simulated and simulated. In the optical experiment, the computer-generated holographic plate is selected as the sample, and the surface micro-contour information and the step height of the sample are obtained. With the result of white light interferometer as the standard, the method can obtain satisfactory imaging quality under the condition that the precision is not too high.
【作者单位】：南京理工大学电子工程与光电技术学院;南京师范大学物理科学与技术学院;
【基金】：国家自然科学基金(批准号:61377015,61505080,61575095) 中国科协“青年人才托举工程”(批准号:2015QNRC001) 中央高校基本科研业务费专项资金(批准号:30920130111007)资助的课题~~
【分类号】：O436.1

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