电容式MEMS环形振动陀螺结构设计及加工

发布时间：2018-01-13 13:23

  本文关键词：电容式MEMS环形振动陀螺结构设计及加工　出处：《中国惯性技术学报》2017年02期 　论文类型：期刊论文

  更多相关文章： 硅微环形振动结构 footing效应 加工工艺 性能测试 零偏稳定性

【摘要】：微机械环形振动陀螺仪采用四波腹工作原理,具有精度高、抗冲击性能好等优点。通常情况下为了提高电容值和信噪比,环形结构会采用高深宽比方案,因此带来的footing效应直接影响了结构加工的成品率。本文在设计环形结构的基础上提出了一种在硅下表面溅射一层Al金属层的方法,能够避免footing效应的发生。实验结果表明,该方法有效提高了结构加工精度。同时,为了验证所设计结构的正确性,对加工出的结构进行了扫频测试,结构驱动模态谐振频率与设计值相差仅0.13%,并在此基础上搭建了测控系统,进一步进行了静态实验,结果表明其零偏稳定性指标为101(°)/h证明了设计和加工的可行性。
[Abstract]:Micromachined annular vibratory gyroscope uses four-wave belly working principle, which has the advantages of high precision, good impact resistance and so on. In order to improve the capacitance and signal-to-noise ratio (SNR), the ring structure usually adopts the scheme of high aspect ratio in order to improve the capacitance value and the signal-to-noise ratio. Therefore, the footing effect has a direct impact on the yield of structural machining. Based on the design of annular structure, a method of sputtering a layer of Al metal layer on the surface of silicon is proposed in this paper. The footing effect can be avoided. The experimental results show that the method can effectively improve the machining accuracy of the structure. At the same time, in order to verify the correctness of the designed structure. The frequency sweep test of the machined structure shows that the resonant frequency of the structure driving mode is only 0.13 points different from the design value. On this basis, the measurement and control system is built, and the static experiment is carried out. The results show that the zero bias stability index is 101 (掳/ h), which proves the feasibility of design and machining.
【作者单位】： 北京理工大学机电动态控制重点实验室;淮海工业集团有限公司MEMS中心;
【基金】：国家自然科学基金NSAF基金(U1630119) 北京理工大学学术启动计划基金
【分类号】：TN96
【正文快照】： 微机电陀螺具有体积小、成本低、可批量生产等以通过后期调整的方法来改善陀螺性能[6]。国内外学方面的优势,在常规弹药制导化的应用中有着迫切的者提出了多种电容式振动环陀螺的制造方法,Farrokh需求[1-2]。与众多其它类型的微机械陀螺相比,振动环Ayazi和Khalil Najafi采用多，

本文编号：1419035