TFT-LCD Stage Mura的研究与改善

发布时间：2018-01-26 18:46

本文关键词： 薄膜晶体管液晶显示器色斑线宽像素间距　出处：《液晶与显示》2017年04期 　论文类型：期刊论文

【摘要】：TFT-LCD面板在屏幕上有斑点或波浪状Mura,影响液晶显示器的品质,经过图形匹配,缺陷与曝光机机台形貌匹配。通过对异常区域特性分析,发现异常区域的BM CD、BM像素间距存在异常。对原因进行模型分析:玻璃在曝光机基台上局部区域发生弯曲,曝光距离变短,致使BM PR受光区域变小,BM CD会偏小,进而导致区域性透过光不均一产生Mura;玻璃弯曲后BM像素间距相对于设计位置也会发生变化,从而导致漏光产生Mura。经过实验验证,BM CD和像素间距的偏差主要由机台凸起导致glass弯曲引起,可以通过降低吸附压力和研磨机台,来改善CD差异和像素间距偏移,同时像素间距偏移漏光,也可以通过增加CD来改善。最终通过BM CD增加、研磨机台和降低吸附压力措施,Stage Mura不良率由10.05%下降至0.11%。
[Abstract]:The TFT-LCD panel has spots or wavy Mura on the screen, which affects the quality of liquid crystal display. After the figure matching, the defect and the appearance of the exposure machine are matched. The characteristics of the abnormal area are analyzed. It is found that there is abnormal pixel spacing in BM CDN BM in abnormal area. The model analysis shows that the glass bends in the local area of the base stage of the exposure machine, and the exposure distance becomes shorter. As a result, BM PR light receiving region becomes smaller and BM CD becomes smaller, which leads to the regional light transmission heterogeneity to produce Mura; When the glass is bent, the distance between BM pixels and the design position will also change, which will lead to the leakage of light to produce Mura. it has been verified by experiments. The deviation between BM CD and pixel spacing is mainly caused by the bending of glass caused by the raised machine. The difference of CD and the offset of pixel spacing can be improved by reducing the adsorption pressure and grinding machine. At the same time the pixel spacing offset leakage can also be improved by increasing CD. Finally increasing BM CD grinding machine and reducing adsorption pressure measures. The Stage Mura rate fell from 10.05% to 0.11.
【作者单位】：北京京东方显示技术有限公司;
【分类号】：TN873.93
【正文快照】： (Beijing BOE Display Technology Co.,Ltd.,Beijing100176,China)薄膜晶体管液晶显示器(TFT-LCD)能够产生色彩的变化,主要是来自彩色滤光片(ColorFilter,即CF)。液晶面板是通过驱动集成电路(IC)的电压改变,使液晶分子排列呈站立或扭转状,形成闸门来选择背光源光线穿透与否,并

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