低成本MEMS惯性测量组件复合标定与误差补偿方法研究

发布时间：2018-04-08 10:43

本文选题：MEMS惯性器件　切入点：微惯性测量单元　出处：《沈阳理工大学》2017年硕士论文

【摘要】：MEMS惯性测量组件具有体积小、功耗低、成本低和可靠性高等优点,在民用和军用领域都具有广阔的应用前景。因此,提高MEMS惯性器件的精度是非常必要的。本文利用实验室现有的实验设备对实验室自制的低成本MEMS惯性测量组件进行标定和补偿方法研究。首先,对实验室自制低成本MEMS惯性测量组件进行确定性误差分析,确定其误差项,建立其常温下的系统误差模型和温度误差模型,利用带温箱的单轴速率转台进行十八位置静态、六位置动态和变温等标定实验,通过不同的算法解算得到误差模型中的误差系数,最后对补偿结果进行分析。其次,考虑到自制MEMS惯性测量组件的实际用途,利用三轴仿真速率转台进行复合运动实验,观察复合运动对器件的影响。建立陀螺仪的耦合项误差模型,设计两种不同的实验方案进行实验,通过算法解算最终得到耦合项的系数,完成了MEMS陀螺仪的复合标定过程。再次,对MEMS惯性器件的输出数据进行了PSD分析和Allan方差分析,表征和辨识了其随机项误差,利用时间序列法建立其随机误差模型,通过Kalman滤波算法对MEMS惯性器件进行随机漂移滤波,观察滤波前后的数据发现随机漂移的幅度明显降低,达到了改善MEMS惯性测量器件随机误差的目的。最后,针对MEMS陀螺仪采用两次卡尔曼滤波处理,不仅可以更进一步提高MEMS陀螺仪精度,而且还可以解决陀螺仪在未知输入转速情况下的补偿工作。
[Abstract]:The MEMS inertial measurement module has the advantages of small volume, low power consumption, low cost and high reliability, so it has a wide application prospect in both civil and military fields.Therefore, it is necessary to improve the precision of MEMS inertial device.In this paper, the calibration and compensation method of the low cost MEMS inertial measurement module made by the laboratory is studied by using the existing laboratory equipment.Firstly, the deterministic error analysis of MEMS inertial measurement module made in laboratory is carried out, and the error terms are determined, and the system error model and temperature error model at room temperature are established.The static, six-position and variable temperature calibration experiments were carried out by using a single-axis rate turntable with a temperature box. The error coefficients in the error model were calculated by different algorithms, and the compensation results were analyzed at last.Secondly, considering the practical use of the self-made MEMS inertial measurement module, the compound motion experiment is carried out by using the three-axis simulation speed turntable to observe the influence of the composite motion on the device.The coupling term error model of the gyroscope is established and two different experimental schemes are designed to carry out the experiment. Finally, the coefficient of the coupling term is obtained by the algorithm solution, and the compound calibration process of the MEMS gyroscope is completed.Thirdly, the output data of MEMS inertial devices are analyzed by PSD and Allan variance analysis, the random term errors are characterized and identified, and its random error model is established by time series method.The random drift filtering of MEMS inertial devices is carried out by using Kalman filtering algorithm. The data before and after the filtering are observed and the amplitude of random drift is obviously reduced, which can improve the random error of MEMS inertial measurement devices.Finally, the MEMS gyroscope can not only improve the precision of the MEMS gyroscope, but also solve the compensation of the gyroscope with unknown input speed by using twice Kalman filter.
【学位授予单位】：沈阳理工大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TN96

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