微悬臂振动干涉测量非正交信号的处理算法

发布时间：2018-06-02 11:26

本文选题：测量 + 微悬臂　；参考：《中国机械工程》2016年04期

【摘要】：设计了干涉条纹形状对悬臂角度变化不敏感的干涉光路系统,针对实际干涉条纹光电转换信号的特点,提出了对难以保证正交化的两路信号进行实时椭圆拟合的方法。应用椭圆拟合及换算参数的结果,推导了干涉条纹相位变化的理论公式。最后,根据相位量与振动位移量的关系,以及振动位移连续性的特点,通过直接解包裹的衔接算法,得到了最终振动位移量。实验表明,该方法在保证足够采样频率的条件下,无需额外硬件计数电路,就能完成微悬臂振动位移的干涉量级精度的测量。
[Abstract]:An interferometric optical path system, which is insensitive to the angle change of the cantilever angle, is designed. In view of the characteristics of the actual interference fringe photoelectric conversion signal, a real time ellipse fitting method is proposed for the two signals which are difficult to ensure orthogonalization. The theory of ellipse fitting and conversion parameters is applied to deduce the theory of the phase change of the interference fringe. Finally, according to the relationship between the phase and the vibration displacement, and the characteristics of the continuity of the vibration displacement, the final vibration displacement is obtained by the direct unwrapping algorithm. The experiment shows that the method can complete the interference of the vibration displacement of the micro cantilever without additional hardware counting circuit under the condition of sufficient sampling frequency. Measurement of the accuracy of the order of magnitude.
【作者单位】：湖北工业大学;
【基金】：国家自然科学基金资助项目(51175154;51275157;51275158) 天津大学精密测试技术及仪器国家重点实验室开放基金资助项目(PIL1209)
【分类号】：TN911.7

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