MOEMS集成波长选择开关的设计及研究

发布时间：2019-02-21 07:31

【摘要】：研究一种基于电磁驱动微光机电系统(MOEMS)光开关阵列的串联集成波长选择开关结构,经过理论分析与计算,得出螺旋形线圈在相同电流密度下相比于八边形和四边形线圈能得到更大的电磁力;通过模态分析得到在设计的悬臂结构下,支撑臂响应时间约为22 ms。采用溅射、光刻、腐蚀和电铸等MOEMS工艺完成了光开关悬臂的制作,并通过制作对准标记及采用可见光与红外光相结合的装调方法,完成了1×8阵列的波长选择开关系统集成。经过测试得到,开关上升和下降的时间均约为20 ms,当电流为0.4 A时,支撑臂的挠度为1.28 mm,能达到系统光路转换的目的。该波长选择开关能够在2 V电压下,实现对8个不同波长信道的任意选择,其最大的插入损耗为1.741 dB,信道均匀性达到0.55 dB;插入损耗的测试结果与计算结果较吻合。
[Abstract]:A series integrated wavelength selective switch structure based on electromagnetically actuated microoptic electromechanical system (MOEMS) optical switch array is studied, which is theoretically analyzed and calculated. Compared with octagonal and quadrilateral coils, the helical coils can obtain greater electromagnetic force at the same current density. Modal analysis shows that the response time of the supporting arm is about 22 ms. under the designed cantilever structure. The optical switch cantilever was fabricated by sputtering, lithography, etching and electroforming, and the wavelength selective switch system of 1 脳 8 array was integrated by making the alignment mark and using the combination of visible light and infrared light. The results show that when the current is 0. 4 A, the deflection of the support arm is 1. 28 mm, and the optical path conversion can be achieved. The wavelength selective switch can choose 8 different wavelength channels arbitrarily at 2 V voltage. The maximum insertion loss of 1.741 dB, channel is equal to 0.55 dB; insertion loss. The measured results are in good agreement with the calculated results.
【作者单位】：中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室;中国科学院大学;
【基金】：国家自然科学基金资助项目(60578036) 吉林省科技发展计划资助项目(20080343) 广东省省级科技计划资助项目(2016B010111003)
【分类号】：TN929.1

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