基于低温共烧陶瓷的微机械差分电容式加速度计的研究（英文）

发布时间：2017-12-28 03:36

本文关键词：基于低温共烧陶瓷的微机械差分电容式加速度计的研究（英文）　出处：《传感技术学报》2016年04期 　论文类型：期刊论文

【摘要】：低温共烧陶瓷(LTCC)技术是实现电子设备小型化、高密度集成化的主流封装/组装集成技术,可适用于耐高温、耐受恶劣环境下的特性要求。报道了以LTCC为结构材料设计、制作的一种MEMS差分电容式加速度计。该器件的敏感质量、4根悬臂梁结构都内嵌于LTCC多层基板,质量块和上下盖板之间通过印刷电极组成差分电容对;高精度电容检测芯片表贴于LTCC基板表面,将差分电容信号转化为电压信号。论文讨论了微机械LTCC加速度计的设计与制备、检测电路和性能测试。LTCC的高密度多层布线减小了互连线的长度和相关耦合寄生电容;基于集成芯片的检测电路解决了分立式检测电路的引起噪声大、电路复杂等问题。测试结果表明:该加速度计结构灵敏度较高,小载荷情况下表现出良好的线性关系,灵敏度约为30.3 m V/gn。
[Abstract]:Low temperature co fired ceramic (LTCC) technology is the mainstream encapsulation / assembly integration technology to realize the miniaturization and high-density integration of electronic devices, and it can be applied to the characteristic requirements under high temperature and harsh environment. A kind of MEMS differential capacitance accelerometer, which is designed and made with LTCC as the structural material, is reported. The sensitive quality and 4 cantilever structures of the device are all embedded in the LTCC multilayer substrate. The differential capacitance between the mass block and the upper and lower cover plates is made up of printed electrodes. The high-precision capacitance detection chip is pasted on the surface of the LTCC substrate, and the differential capacitance signal is converted to voltage signal. The design and preparation of micromachined LTCC accelerometer, detection circuit and performance test are discussed in this paper. The high density multilayer wiring of LTCC reduces the length of interconnect and the coupling parasitic capacitance. The detection circuit based on integrated chip solves the problems of large noise and complex circuit caused by discrete detection circuit. The test results show that the accelerometer has a high sensitivity and a good linear relationship under the small load, and the sensitivity is about 30.3 m V/gn.
【作者单位】：北京信息科技大学信息微系统研究所;北京大学微米/纳米加工技术国家级重点实验室;中国电子科技集团公司第五十四研究所;
【基金】：国家自然科学基金项目(61176102,60976083,60501007,61404119) 北京市属高等学校高层次人才引进与培养计划项目(CIT&TCD20150320) 北京市自然科学基金项目(3102014)
【分类号】：TH824.4
【正文快照】： LTCC technology is used for fabricating sensorsand actuators,especially for harsh environment due toits good physical-chemical properties,low costs,highreliability,and the possibility to create integrated three——dimensional micro structures[1].Though a

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