超光滑表面的积分散射测量仪器研究

发布时间：2018-01-05 19:38

本文关键词：超光滑表面的积分散射测量仪器研究　出处：《南京理工大学》2016年硕士论文　论文类型：学位论文

【摘要】：激光陀螺反射镜基片的表面质量,影响着激光陀螺的闭锁阈值,决定了激光陀螺的精度。随着生产规模的扩大,人工检测方法暴露出随机性大、效率低等问题,研制出针对激光陀螺反射镜表面缺陷的快速检测、定位仪器很有必要。论文根据积分散射测量原理对超光滑反射镜基片表面缺陷检测进行了原理实验,对实验中出现的光源功率波动、杂散光干扰和散射光方向性等关键问题进行了研究,对工程化样机中的关键部件根据研究结果进行了软硬件的重新设计,并完成了样机的装调和初步测试。为解决光源功率波动的影响问题,研究了光源的稳定性和不同导光方式的优缺点,设计了专用斩波器,完成了仪器导光光路设计。为解决杂散光对测试的干扰问题,利用FRED软件对测试光路进行了建模分析,研究了不同入射位置下样品的杂散光表现,设计了共焦聚焦镜组,通过仿真实验验证了镜组杂散光屏蔽的有效性,光路杂散光系数优于0.01。为解决散射光的方向性及缺陷定位需求问题,研究分析了不同组合方案和扫描流程的优劣,优化了多角度扫描测试的测试方案,提高了测试效率。为解决旋转坐标变化问题,建模分析了旋转后目标点与数据点测试数据的关系性,设计了旋转后坐标对齐算法,并开发了仪器专用测试软件。最后对仪器进行了组装调试,并完成了对样品的测试实验,实验结果表明仪器检测结果与人工检测结果一致,测试数据重复性优于6%,达到了仪器的设计目标。
[Abstract]:The surface quality of laser gyro mirror substrate affects the locking threshold of laser gyro, and determines the precision of laser gyro. With the expansion of production scale, the problems of large randomness and low efficiency are exposed by manual detection method. In order to detect the surface defect of laser gyro mirror, it is very necessary to develop a positioning instrument. Based on the principle of integrated scattering measurement, the principle of surface defect detection of super-smooth reflector is tested in this paper. The key problems such as the power fluctuation of the light source, the stray light interference and the direction of the scattering light are studied. The key components in the engineering prototype are redesigned according to the results of the research. In order to solve the problem of power fluctuation of light source, the stability of light source and the advantages and disadvantages of different light guide modes are studied, and a special chopper is designed. In order to solve the interference problem of stray light to the test, the test light path was modeled and analyzed by FRED software, and the stray light performance of samples at different incident positions was studied. A confocal focusing mirror set is designed and the effectiveness of the stray light shielding is verified by simulation experiments. The stray light coefficient of the optical path is better than 0.01.In order to solve the problem of directionality and defect location of scattered light. The advantages and disadvantages of different combination schemes and scanning flow are analyzed and the test scheme of multi-angle scanning test is optimized to improve the test efficiency. The relationship between the rotating target point and the data point test data is analyzed, the rotation coordinate alignment algorithm is designed, and a special instrument testing software is developed. Finally, the instrument is assembled and debugged. The experimental results show that the test results are consistent with the manual test results, and the repeatability of the test data is better than that of 6 samples, which achieves the design goal of the instrument.
【学位授予单位】：南京理工大学
【学位级别】：硕士
【学位授予年份】：2016
【分类号】：TH744.5

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