应用高精度旋转法的干涉仪检测误差校正

发布时间：2018-01-09 14:22

本文关键词：应用高精度旋转法的干涉仪检测误差校正　出处：《光学精密工程》2015年05期 　论文类型：期刊论文

【摘要】：针对利用高精度菲索型干涉仪和旋转平均法对光学元件进行面形绝对检测时对旋转精度的要求,提出了一种旋转误差校正模型来修正面形绝对检测中的旋转非对称项误差。首先基于经典N步旋转平均法理论,通过泽尼克多项式给出面形误差的数学表达形式;然后根据旋转角度所引起的误差修正泽尼克系数进而修正旋转非对称项误差;最后用数值仿真及实验的方法验证了校正模型的正确性。在旋转角度误差为0.1°条件下的仿真结果显示:N步旋转平均法所得面形误差RMS值为真实面形的10.13%,校正后面形误差RMS值为真实面形的6.79%;实验结果显示:N步旋转平均法所得面形误差RMS值为真实面形的10.28%,校正后面形误差RMS值为真实面形的5.77%。这些结果证明所提出的校正模型准确可靠,提高了旋转平均法的检测精度。
[Abstract]:This paper aims at the requirement of rotation precision when using high-precision Fresso interferometer and rotating average method to detect the surface shape of optical elements. In this paper, a rotation error correction model is proposed to correct the error of rotation asymmetry in absolute frontal shape detection. Firstly, based on the classical N-step rotation averaging theory. The mathematical expression of the appearance error is given by Zehnik polynomial. Then, according to the error caused by rotation angle, the Zenick coefficient is corrected and then the rotation asymmetry term error is corrected. Finally, the correctness of the correction model is verified by numerical simulation and experiment. The simulation results show that the error of rotation angle is 0.1 掳. The RMS value of the surface shape error obtained by the N-step rotation averaging method is 10.13% of the true surface shape. The correction of the RMS value of the rear shape error is 6.79 of the true surface shape; The experimental results show that the RMS value of the surface error obtained by the rotation averaging method is 10.28% of that of the real surface. The results show that the proposed calibration model is accurate and reliable and improves the accuracy of the rotating average method.
【作者单位】：中国科学院长春光学精密机械及物理研究所;中国科学院大学;中国人民解放军防化研究院;
【基金】：国家自然科学基金资助项目(No.60902067) 吉林省重大科技攻关项目(No.112DGG001)
【分类号】：TH744.3
【正文快照】： 2.中国科学院大学,北京100039;3.中国人民解放军防化研究院,北京102205)1引言在研制193nm光刻机过程中,对其投影物镜的光学元件面形均方根RMS精度要求为1~2nm,对部分关键元件的要求更高。为达到上述加工精度,需确定光学元件面形,因此采用高精度检测仪器实现面形绝对检测具有重

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