超轻量化SiC反射镜的制备及性能

发布时间：2018-02-11 00:45

本文关键词： 光学制造 SiC 超轻量化反射镜真空辅助凝胶注模反应烧结　出处：《光学精密工程》2015年08期 　论文类型：期刊论文

【摘要】：采用真空辅助凝胶注模和反应烧结法制备了面密度分别为9.35和11.7kg/m2,直径分别为200和500mm的两块超轻量化SiC反射镜,检测了反射镜的主要性能。结果显示:由于在真空环境下浇注,坯体没有宏观缺陷。材料中细小SiC颗粒的存在使材料具有相对较高的抗弯强度(335 MPa)和断裂韧性(4.5 MPa·m12)。此外,反射镜材料金相组织中未出现明显的SiC颗粒定向排列,具有较好的各向同性度:不同方向热膨胀系数差异小于3%,模量差异为1.3%。镜坯经过光学加工后面形误差(RMS值)为0.043λ(λ=632.8nm),表面粗糙度(Ra值)优于5nm。实验表明,真空辅助凝胶注模成型结合反应烧结工艺制备的超轻量化SiC反射镜各方面性能良好,适用于制备空间相机用反射镜。
[Abstract]:Two ultra-lightweight SiC mirrors with surface density of 9.35 and 11.7 kg / m2, diameter of 200 mm and 500 mm in diameter were prepared by vacuum assisted gel injection and reactive sintering. The main properties of the mirrors were tested. There are no macroscopic defects in the billet. The existence of fine SiC particles in the material makes the material have relatively high flexural strength of 335MPa) and fracture toughness of 4.5 MPa 路m120.Furthermore, there is no obvious directional arrangement of SiC particles in the metallographic structure of the mirror material. It has good isotropy: the difference of coefficient of thermal expansion in different directions is less than 3, the difference of modulus is 1.3. The error of rear shape and RMS value of mirror blank after optical processing is 0.043 位 (位 ~ (63. 8) nm ~ (-1), the value of surface roughness and Ra) is better than 5 ~ (nm). The experimental results show that the coefficient of thermal expansion is less than 3, and the difference of modulus is 1.3%. The ultra-lightweight SiC mirrors prepared by vacuum assisted gel injection molding combined with reactive sintering process have good performance in all aspects and are suitable for the preparation of space camera mirrors.
【作者单位】：中国科学院长春光学精密机械与物理研究所;
【基金】：超轻RBSiC反射镜制备技术研究(No.Y2CXISS126)
【分类号】：TH74;TQ163.4

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