考虑边缘和寄生电容的微加速度计的非线性误差研究

发布时间：2018-02-24 18:09

本文关键词： 微加速度计边缘电容寄生电容非线性误差有限元法　出处：《机械科学与技术》2016年05期 　论文类型：期刊论文

【摘要】：为了使微加速度计满足线性度指标,准确计算微加速度计的非线性误差是非常必要的。在考虑边缘和寄生电容的前提下,提出了计算微加速度计的非线性误差的方法。首先根据表芯结构的电容分布特点建立了其等效电路模型,并推导了微加速度计的输出电压与检测电容和寄生电容之间的关系式,其中检测电容包含了边缘电容;其次,基于有限元法,分别提出了计算微加速度计的寄生电容和检测电容的方法;最后建立了微加速度计的输出电压与输入加速度之间的关系式,并基于三次多项式拟合,推导出微加速度计的非线性误差的计算公式。通过对比分析非线性误差的理论计算结果与实验测量结果,提出的方法的正确性得到了验证。
[Abstract]:In order to make the micro-accelerometer satisfy the linearity index, it is necessary to calculate the nonlinear error of the micro-accelerometer accurately. A method to calculate the nonlinear error of microaccelerometer is presented. Firstly, the equivalent circuit model is established according to the capacitance distribution of the surface core structure, and the relationship between the output voltage of the micro-accelerometer and the detection capacitance and parasitic capacitance is derived. The detection capacitance includes the edge capacitance. Secondly, based on the finite element method, the method of calculating the parasitic capacitance and the detection capacitance of the micro-accelerometer is proposed. Finally, the relationship between the output voltage and the input acceleration of the micro-accelerometer is established, and based on the cubic polynomial fitting, The formula for calculating the nonlinear error of micro-accelerometer is derived, and the correctness of the proposed method is verified by comparing and analyzing the theoretical and experimental results of the nonlinear error.
【作者单位】：西南交通大学机械工程学院;中国工程物理研究院电子工程研究所;电子科技大学机械电子工程学院;
【基金】：国家自然科学基金项目(51175437)资助
【分类号】：TH824.4

【相似文献】