用等效应力法分析温度变化对胶粘反射镜面形的影响

发布时间：2018-03-02 13:15

  本文选题：光学检测　切入点：光学元件　出处：《光子学报》2015年12期 　论文类型：期刊论文

【摘要】：基于等效应力法分析了温度变化对反射镜面形准确度的影响.对反射镜粘接处施加一定量的径向强迫位移约束,使其受到与热应力大小一致的应力作用,在该强迫位移约束下反射镜面形变化与热应力作用下反射镜面形变化基本一致.对直径为70mm、厚度为15mm的反射镜进行粘接实验,用ZYGO干涉仪测定温变前后反射镜的面形变化.当温度由20℃降到16℃时,反射镜面形峰谷值和均方根值的变化量分别为0.005λ和0.002λ(λ=632.8nm),理论计算的峰谷值和均方根值变化量分别为0.004λ和0.002λ;当温度由20℃升高到30℃时,反射镜面形峰谷值和均方根值变化量分别为0.013λ和0.006λ,理论计算的峰谷值和均方根值变化量分别为0.012λ和0.004λ,实验值和模拟分析值基本一致.
[Abstract]:Based on the method of equal effect force, the effect of temperature change on the accuracy of mirror shape is analyzed. A certain amount of radial forced displacement constraint is applied to the bonding of the mirror, which is subjected to the same stress as the thermal stress. The change of reflection mirror shape under the constraint of forced displacement is basically the same as that of reflection mirror shape under thermal stress. The bonding experiment of the mirror with a diameter of 70 mm and a thickness of 15 mm is carried out. ZYGO interferometer was used to measure the surface shape change of the mirror before and after the temperature change. When the temperature was reduced from 20 鈩，

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