数字莫尔移相干涉仪仪器化研究

发布时间：2018-03-08 22:10

本文选题：干涉仪仪器化　切入点：实际非零干涉仪　出处：《北京理工大学》2016年硕士论文　论文类型：学位论文

【摘要】：非球面光学元件由于其广泛的运用,其检测技术以及检测仪器显得尤为重要。当前基于非球面的干涉测量方法的检测仪器是非球面检测仪器的发展方向,非零检验干涉测量中基于部分补偿法的数字莫尔移相干涉测量方法具有测量精度高、测量通用性比较好、测量速度快、调整校准较简单的优点,在大口径、深度非球面检测领域具有良好的发展前景,但是市场上与之相应的干涉仪几乎处于空白。基于此,本论文在部分补偿法与数字莫尔移相干涉测量方法的基础上进行数字莫尔移相干涉仪仪器化的研究。本论文首先基于数字莫尔移相干涉仪的原理以及非球面测量指标对数字莫尔移相干涉仪的进行了总体系统设计,包括实际非零干涉仪,图像传输系统,莫尔图像实时合成与显示系统,并分析每个子系统功能与设计难点,接下来论文对每个子系统分别进行了研究设计。完成实际非零干涉仪光学系统整体光路方案研究,设计了一种综合泰曼格林和菲索干涉光路优点的光路,并在Zemax中对整体光路中的扩束系统以及望远系统进行了设计优化与公差分析,达到设计指标,实现了实际非零干涉仪光学系统。基于图像的传输需求对图像传输系统的硬件电路选型,并在此基础上完成图像传输系统的总体设计。主要研究图像传输系统中FPGA与DSP的图像数据传输,选择了基于EMIF接口的EDMA传输方式,对软件模块进行分析与设计,完成了图像数据高速传输的功能。对于莫尔合成与显示系统,主要研究数字莫尔技术在DSP上的实现。DSP中得到的莫尔合成图像与被测非球面表面误差的直观对应,观测莫尔合成图像能够调节实际非零干涉仪,并对如何调节进行了定性分析。上述研究为数字莫尔移相干涉仪仪器化奠定了基础。
[Abstract]:Because of the wide application of aspheric optical elements, its detection technology and testing instruments are particularly important. At present, the detection instrument based on aspheric interferometry is the development direction of aspherical testing instruments. The digital moire phase shift interferometry based on partial compensation method in non-zero test interferometry has the advantages of high precision, good generality, fast measurement speed and simple adjustment and calibration. The field of depth aspherical measurement has a good prospect, but the corresponding interferometer in the market is almost blank. In this paper, based on the partial compensation method and the digital moire phase shift interferometry, the instrumentation of the digital moire phase shift interferometer is studied. Firstly, the principle of the digital moire phase shift interferometer and the aspheric measurement. The overall system design of the digital moire phase shift interferometer is presented. Including the actual non-zero interferometer, image transmission system, moire image real-time synthesis and display system, and analysis of each subsystem function and design difficulties, Then, each subsystem is studied and designed separately. The whole optical path scheme of practical non-zero interferometer optical system is studied, and an optical path which combines the advantages of Tymangreen and Fisso interference optical path is designed. The design optimization and tolerance analysis of the beam expansion system and the telescopic system in the whole optical path are carried out in Zemax, and the design targets are achieved. The practical non-zero interferometer optical system is realized. Based on the image transmission requirement, the hardware circuit of the image transmission system is selected. On this basis, the overall design of the image transmission system is completed. The image data transmission between FPGA and DSP in the image transmission system is mainly studied. The EDMA transmission mode based on the EMIF interface is selected, and the software module is analyzed and designed. For the moire synthesis and display system, the realization of digital moire technology on DSP. The observed moire synthetic image can adjust the actual non-zero interferometer, and the qualitative analysis of how to adjust it is carried out, which lays a foundation for the instrumentation of the digital moire phase shift interferometer.
【学位授予单位】：北京理工大学
【学位级别】：硕士
【学位授予年份】：2016
【分类号】：TH744.3

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