剪切压电惯性驱动器的仿真分析与试验研究

发布时间：2018-03-29 14:22

本文选题：压电驱动　切入点：剪切压电　出处：《吉林大学》2016年硕士论文

【摘要】：随着科学不断发展,驱动传动技术也在推陈出新,经过众多的创新开发,从传统的驱动传动机构到传统的精密驱动器,再到各类新型驱动技术的不断涌现。超精密定位技术已不仅是综合应用能力知识的体现,也成为现代科学技术中高新技术的重要支撑。现代科学技术的快速发展,也对超精密定位技术提出了更多的应用需求。精密驱动器是各类设计高精密定位技术的核心部件,在整个定位框架中,既可以作为动力输出部件,又可以作为执行部件。与此同时,精密驱动器在航空航天、生物医学、微纳机电系统、科学仪器等领域也成为重要支撑技术之一。国内外学者也都陆续开始深入研究现代精密驱动器,将其作为重点研究方向,努力开发设计出更先进、性能更好的精密驱动器,这也大力的推动了超精密定位技术的发展。近年来不断涌现的各类新型精密驱动器,让国内外学者更坚信这一领域将成为现代科技发展引领者。本文对国内外各研究领域中对各类驱动器特别是压电驱动器的发展现状进行了分析,在此基础上以逆压电效应中的剪切效应为机理,利用剪切型压电叠堆直接作为驱动单元,设计研制了一种新式的剪切压电惯性驱动器。对压电陶瓷特性和柔性铰链性能进行了分析研究。对剪切压电惯性驱动器的结构组成、运动机理进行了详细的介绍,对驱动装置原理进行了分析。利用ABAQUS有限元仿真软件对驱动装置柔性铰链进行了力学仿真及对装置的模态分析,验证了设计的可行性。研制了剪切压电惯性驱动器的原型样机。利用Lab VIEW软件设计了PID闭环控制系统,提升了装置的定位精度及往复运动系统稳定性。通过搭建剪切压电惯性驱动器试验系统,对驱动器试验性能进行测试研究。经试验获得了剪切压电惯性驱动器运动步长与输出信号电压、输出信号频率、垂直负载的关系,运动速度与输出信号频率的关系等。剪切压电惯性驱动器的分辨率为0.1μm,最大运动速度为2mm/s,有效工作电压为40—200V,有效工作频率为1—600Hz。
[Abstract]:With the continuous development of science, the driving drive technology is also emerging from the old to the new. After many innovative developments, from the traditional drive drive mechanism to the traditional precision driver, The ultra-precision positioning technology is not only the embodiment of comprehensive applied ability knowledge, but also the important support of high and new technology in modern science and technology, the rapid development of modern science and technology, It also puts forward more application requirements for ultra-precision positioning technology. Precision driver is the core component of all kinds of high precision positioning technology. In the whole positioning frame, it can be used as the power output component. At the same time, precision actuators are used in aerospace, biomedical, micro / nano electromechanical systems, Scientific instruments and other fields have also become one of the important supporting technologies. Scholars at home and abroad have also begun to study modern precision actuators in depth one after another, taking them as the key research directions, and making efforts to develop and design more advanced and better precision drivers. This has also greatly promoted the development of ultra-precision positioning technology. It is believed that this field will lead the development of modern science and technology. In this paper, the current situation of all kinds of actuators, especially piezoelectric actuators, is analyzed. On this basis, the shear effect in inverse piezoelectric effect is taken as the mechanism, and the shear type piezoelectric stack is directly used as the driving unit. A new type of shear piezoelectric inertial actuator is designed and developed. The properties of piezoelectric ceramic and flexure hinge are analyzed. The structure and motion mechanism of shear piezoelectric inertial actuator are introduced in detail. The principle of the drive device is analyzed. The mechanical simulation and modal analysis of the flexible hinge of the drive device are carried out by using the ABAQUS finite element simulation software. The feasibility of the design is verified. The prototype of the shear piezoelectric inertial actuator is developed. The PID closed-loop control system is designed by using Lab VIEW software. The positioning accuracy of the device and the stability of the reciprocating motion system are improved. The relationship between the motion step size of the shear piezoelectric inertial actuator and the output signal voltage, output signal frequency and vertical load is obtained. The resolution of shear piezoelectric inertial actuator is 0.1 渭 m, the maximum velocity is 2 mm / s, the effective working voltage is 40-200 V, and the effective frequency is 1-600 Hz.
【学位授予单位】：吉林大学
【学位级别】：硕士
【学位授予年份】：2016
【分类号】：TH703

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