高量程压阻式加速度计的Hopkinson杆冲击测试及失效分析

发布时间：2018-04-20 16:35

本文选题：MEMS加速度计 + Hopkinson杆　；参考：《中国惯性技术学报》2015年06期

【摘要】：为了保证高量程加速度计在冲击过程中的可靠性、有效性,减小其失效几率,以Hopkinson杆作为加载手段,采用激光干涉法对量程为1.0′10~5 g_n的4端全固支压阻式梁-岛结构微加速度计进行冲击试验,并分析了高量程加速度计抗过载能力及在冲击环境下失效模式和失效机理。试验中抽样对同种结构的10只传感器分别进行了冲击测试,根据测试结果可知,该结构的微加速度计抗过载能力为1.3′10~5g_n。通过分析可知失效模式主要表现为微结构梁的断裂、裂纹、键合点脱落现象。通过研究失效模式产生的原因发现,造成结构出现断裂、裂纹现象的原因主要有两种:一是重复连续冲击测试引起微结构疲劳产生失效;二是由于在冲击过程中加速度计芯片与该过程中产生的高频信号分量发生共振导致过载瞬间增大加速度计芯片结构位移失控使结构失效。通过采用不同手段完善传感器结构,提高了其可靠性。
[Abstract]:In order to ensure the reliability and effectiveness of high range accelerometer during impact and reduce its failure probability, the Hopkinson rod is used as loading method. The impact test of a four-terminal fully clamped piezoresistive beam-island structure accelerometer with a measuring range of 1.0 ~ 10g / n was carried out by means of laser interferometry. The anti-overload capacity of a high-range accelerometer and its failure mode and failure mechanism under impact environment were analyzed. In the experiment, 10 sensors of the same structure were tested by impact test. According to the test results, the anti-overload ability of the micro-accelerometer of the same structure was 1.3105g / n. Through the analysis, it can be seen that the failure modes are mainly the fracture, crack and bond point shedding of the microstructural beam. By studying the causes of failure mode, it is found that there are two main reasons for the structure fracture and crack phenomenon: one is the fatigue failure of microstructures caused by repeated continuous impact testing; The second is that the accelerometer chip has resonance with the high frequency signal component in the process of impact, which results in the instantaneous increase of overload and the loss of control of the structure displacement of the accelerometer chip, which makes the structure invalid. The reliability of the sensor is improved by using different methods to perfect the sensor structure.
【作者单位】：中北大学电子测试技术国防科技重点实验室;中北大学仪器科学与动态测试教育部重点实验室;中北大学仪器与电子学院;
【基金】：国家自然科学基金杰出青年(51225504)
【分类号】：TH824.4

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