大口径平面光学元件的磁流变加工

发布时间：2018-04-22 14:07

本文选题：平面光学元件 + 磁流变加工　；参考：《光学精密工程》2016年12期

【摘要】：为了实现大口径平面光学元件的高精度加工,开展了磁流变加工技术的研究。介绍了磁流变加工原理及去除函数的数学模型。根据磁流变加工的特点,建立了元件整体加工的工艺流程,给出了元件加工的工艺要素。然后,开发了抛光斑的提取软件,并基于轨迹段划分的速度模式开发了工艺软件,分析了工艺软件的各项功能模块。最后,基于元件加工的工艺流程,对一件800mm×400mm的元件进行了加工实验。利用检测设备测得了元件的低、中、高频的加工指标,其低频反射波前PV值为34nm,中频波前功率谱密度(PSD1)值为1.7nm,高频粗糙度Rq值为0.27nm。实验显示了较好的实验结果,验证了利用磁流变加工技术实现了大口径光学元件的高精度加工的可行性。本文还阐述了磁流变加工技术在高功率激光元件中应用的优点。
[Abstract]:In order to realize high precision machining of large aperture planar optical elements, the magneto-rheological machining technology was studied. The principle of magneto-rheological machining and the mathematical model of removal function are introduced. According to the characteristics of Magnetorheological Machining (MRF), the process flow of integral element processing is established, and the process elements of element processing are given. Then, the software of polishing spot extraction is developed, and the process software is developed based on the velocity mode of trajectory division. The function modules of the process software are analyzed. Finally, based on the technological process of element processing, the processing experiment of a component of 800mm 脳 400mm is carried out. The low, middle and high frequency machining indexes of the components are measured by using the measuring equipment. The PV value of the low frequency reflected wave front is 34 nm, the power spectral density (PSD 1) of the if wave front is 1.7 nm, and the high frequency roughness RQ value is 0.27 nm. The experiment shows good experimental results and verifies the feasibility of high precision machining of large aperture optical elements by magneto-rheological machining technology. The advantages of magnetorheological processing technology in high power laser components are also described in this paper.
【作者单位】：哈尔滨工业大学;中国工程物理研究院激光聚变研究中心;
【基金】：科学挑战专题资金资助项目(No.JCKY2016212A506-0502)
【分类号】：TH74

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