基于数字微镜器件实现共焦测量的结构光参数

发布时间：2018-05-17 01:37

本文选题：共焦测量 + 分光器件　；参考：《光学精密工程》2015年05期

【摘要】：虽然采用并行共焦测量提升了共焦测量速度,但系统中的传统光分束器件参数固化后难以适应不同的被测对象。本文利用数字微镜器件(Digital Micromirror Device,DMD)可产生柔性化结构光的特点,将其作为光分束器件引入共焦测量装置以提升系统对被测对象的适应性。理论分析了DMD的空间调制方法,搭建了DMD的共焦测量装置,研究了DMD结构光参数对共焦测量轴向分辨率、横向分辨率以及图像对比度等指标的影响。实验表明,在光学系统参数匹配的条件下,结构光光点参数越小,测量分辨率越高。同时,利用DMD进行柔性化照明,改善了因光点参数小造成的图像对比度下降的问题。得到的结果为研究基于DMD的跨尺度测量方法提供了研究基础。
[Abstract]:Although the speed of confocal measurement is improved by using parallel confocal measurement, it is difficult to adapt the parameters of the traditional beam splitter to different measured objects after curing. In this paper, the flexible structured light can be produced by the digital micromirror device Digital Micromirror device, which is introduced into the confocal measuring device as a beam splitter to enhance the adaptability of the system to the object under test. The spatial modulation method of DMD is analyzed theoretically and the confocal measurement device of DMD is built. The influence of structural light parameters of DMD on axial resolution lateral resolution and image contrast of confocal measurement is studied. The experimental results show that the smaller the structure light point parameter, the higher the measurement resolution under the condition of optical system parameter matching. At the same time, the DMD is used for flexible illumination, which improves the problem of image contrast decline caused by the small parameters of the spot. The obtained results provide a basis for the study of cross-scale measurement methods based on DMD.
【作者单位】：华侨大学机电及自动化学院;上海理工大学光学工程博士后流动站;
【基金】：福建省自然科学基金青年创新基金资助项目(No.2013J05078) 华侨大学高层次人才科研启动基金资助项目(No.12BS109)
【分类号】：TH74

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