基于高阶谐振悬臂的动态原子力显微镜的研制

发布时间：2018-05-20 09:58

本文选题：高阶谐振 + 轻敲模式　；参考：《低温与超导》2014年05期

【摘要】：动态原子力显微镜微悬臂为无限自由度系统,具有多个谐振模态的振动特性。微悬臂的工作振动频率是影响动态原子力显微镜系统的测量特性的关键参数之一,为了提高微悬臂的谐振频率,结合悬臂的高阶谐振特性,研制了基于高阶谐振悬臂的轻敲式动态原子力显微镜,可实现对微观表面的测量,并且明显改善了动态原子力显微镜系统的测量灵敏度、测量速度等测量特性。
[Abstract]:The dynamic atomic force microscope (DAFM) microcantilever is an infinite degree of freedom system with multiple resonant modes. The working vibration frequency of the micro cantilever is one of the key parameters affecting the measurement characteristics of the dynamic atomic force microscope system. In order to improve the resonant frequency of the micro cantilever, the high order resonance characteristic of the cantilever is combined. A light knock dynamic atomic force microscope based on high-order resonant cantilever is developed, which can realize the measurement of micro surface, and obviously improve the measuring sensitivity and measuring speed of dynamic atomic force microscope system.
【作者单位】：合肥工业大学仪器科学与光电工程学院;安徽建筑大学电子与信息工程学院;
【基金】：国家自然科学基金资助项目(50975075)资助
【分类号】：TH742

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