硅基微光学平台的设计和制作

发布时间：2018-05-20 06:47

本文选题：微光学平台 + 硅基　；参考：《微纳电子技术》2016年09期

【摘要】：微型的、可重复装配的、硅基的微光学实验平台和操作平台对于实现光学分析仪器的微型化具有重要的研究意义。设计制作了一种硅基的微光学平台,它包含有微光学基板和微光学夹持片。首先采用有限元分析软件Comsol对微光学夹持片的关键结构即弹片进行了应力仿真,确定了弹片在被拉伸过程中断裂时的最大位移,而后在此基础上设计了一种微光学基板和几种微光学夹持片。实验中采用微电子的工艺,通过配合使用电感耦合等离子体(ICP)干法刻蚀和各向异性湿法腐蚀工艺制备了微光学基板和微光学夹持片的样品。最后将二者装配在一起,从而建立起一个硅基的微光学平台。并且,夹持片可以在基板上实现滑动和重复装配。
[Abstract]:Micro, reproducible, silicon based microoptics experimental platform and operating platform have important significance to realize the miniaturization of optical analysis instruments. A silicon based micro optical platform is designed and fabricated. It includes microoptical substrate and microoptical gripper. First, a finite element analysis software Comsol is used for microoptical gripping. The key structure, that is, the stress simulation of the flakes, determines the maximum displacement of the fragment when it is stretched during the tensile process. On this basis, a micro optical substrate and several micro optical gripps are designed. In the experiment, microelectronic technology is used in conjunction with the use of inductively coupled plasma (ICP) to etch and anisotropic wet. The samples of microoptical substrates and microoptical gripper were prepared by the method of normal corrosion. Finally, the two groups were assembled to establish a silicon based microlight platform. And the clip could be slipped and repeated on the substrate.
【作者单位】：中国科学院半导体研究所半导体集成技术工程研究中心;
【基金】：国家自然科学基金资助项目(61275145)
【分类号】：TH74

【相似文献】