扫描探针显微镜多功能组合探针系统研制

发布时间：2018-06-08 05:04

本文选题：扫描探针显微镜 + 多功能组合探针　；参考：《西南交通大学》2016年硕士论文

【摘要】：扫描探针显微镜是目前一种用途广泛的表面分析仪器,它不仅广泛应用于物理、化学、生物、医学等基础研究领域,还在微纳制造和微电子等的应用研究领域中发挥着越来越重要的作用。然而,目前商业化的扫描探针显微镜主要为单一探针的工作模式,其功能相对单一,难以实现一些较为复杂的实验及检测功能。例如,在特殊环境下(如真空或辐射环境)的微观磨损实验中,若采用单一探针模式,在完成磨损实验后,需要更换曲率半径更小的针尖才能对表面磨损区域进行原位的高分辨形貌扫描与观测。然而,在更换针尖的过程中,微观磨损的实验环境势必会遭到破坏,使试样暴露在大气中,由此引发的氧化、电化学作用、表面污染等将可能造成试验结果偏离真实,不利于对实验结果的科学分析。因此,亟需研发可用于原位实验和观测的扫描探针显微镜多探针原位检测系统,实现不同功能探针的协同检测与分析。基于上述需求,本论文在日本精工公司SPI3800N扫描探针显微镜的平台上,通过设计高精度的移动定位平台、可长距离移动的多探针装夹装置、光学窗口以及系统各部分密封装置,开发出了一套低成本、高效率、稳定性好的手动式多探针原位检测系统；在此基础上,进一步提出了具有更高探针定位精度、高自动化程度、集成拉曼光谱的多功能组合探针系统结构的设计方案。基于上述研究,本文的主要工作及创新点如下：(1)研制出了一套低成本、高效率、稳定性好的手动式多功能组合探针原位检测系统。通过设计手动高精度定位平台、探针支撑结构、光学窗口以及系统综合密封,实现了多功能组合探针系统与扫描探针显微镜的有效匹配；在此基础上,设计和加工了手动式多功能组合探针原位检测系统。(2)研制了一套简易的适用于真空长距离、复杂结构、大温差跨度的温度测量系统。针对SPI3800N扫描探针显微镜真空腔体结构特点,选择了铂热电阻传感器和XMT806型智能PID温控仪,并通过三线制接法消除由于导线自身电阻产生的温度测量误差。该系统适用于中低真空环境,具有结构简单,测量精准,成本较低等优点。(3)为实现扫描探针技术-微区拉曼两种技术的联用,提出两种集成拉曼光谱的自动式多功能组合探针系统初步结构设计方案。根据设备的工作要求,选择合适的压电定位器,并通过探针载动圆盘结合探针夹具设计出探针定位平台；在此基础上,进一步给出拉曼物镜“外置式”和“内置式”两种多功能组合探针系统的设计方案。以上设备的研制,将有利于增强特定测试工况下微观摩擦磨损实验结果的真实性和可信度。相关的研究成果不仅有助于丰富纳米摩擦学的基础理论体系,还有望促进扫描探针技术应用的进一步拓展。
[Abstract]:Scanning probe microscope is a widely used instrument for surface analysis. It is not only widely used in physical, chemical, biological, medical and other basic research fields. It also plays a more and more important role in the application of micro-nano fabrication and micro-electronics. However, at present, the commercial scanning probe microscope is mainly a single probe mode, its function is relatively single, it is difficult to achieve some more complex experimental and detection functions. For example, in microscopic wear experiments in special environments (such as vacuum or radiation), if a single probe mode is used, after finishing the wear test, It is necessary to replace the tip with smaller curvature radius in order to scan and observe the surface wear area in situ with high resolution. However, in the process of replacing the tip of the needle, the experimental environment of microscopic wear will inevitably be destroyed, and the samples will be exposed to the atmosphere, which may lead to oxidation, electrochemical action, surface contamination and so on, which may cause the test results to deviate from the truth. It is unfavorable to the scientific analysis of the experimental results. Therefore, there is an urgent need to develop a scanning probe microscope multi-probe in-situ detection system which can be used for in-situ experiments and observations to realize the cooperative detection and analysis of probes with different functions. On the platform of SPI3800N scanning probe microscope of Japan Seiko Company, this paper designs a high precision mobile positioning platform, a long distance moving multi-probe clamping device, an optical window and a sealing device of all parts of the system. A set of low cost, high efficiency and good stability manual multiprobe in situ detection system is developed. On the basis of this, it is further proposed that the system has higher probe positioning accuracy and high automation. Design scheme of multifunctional combined probe system integrated Raman spectroscopy. Based on the above research, the main work and innovation of this paper are as follows: 1) A low cost, high efficiency and good stability manual multifunctional probe in situ detection system has been developed. By designing the manual high precision positioning platform, the probe supporting structure, the optical window and the integrated sealing of the system, the effective matching between the multifunctional combined probe system and the scanning probe microscope is realized. In this paper, a manual multifunctional probe in situ detection system is designed and manufactured. A simple temperature measurement system is developed, which is suitable for long vacuum distance, complex structure and large temperature difference span. According to the structural characteristics of vacuum cavity of SPI3800N scanning probe microscope, platinum thermal resistance sensor and XMT806 intelligent pid temperature control instrument are selected, and the temperature measurement error caused by wire resistance is eliminated by three-wire connection method. The system is suitable for medium and low vacuum environment. It has the advantages of simple structure, accurate measurement, low cost and so on. Two primary structural design schemes of automatic multifunctional combined probe system integrated Raman spectroscopy are presented. According to the working requirements of the equipment, the suitable piezoelectric positioner is selected, and the probe positioning platform is designed by means of the probe moving disk and the probe clamp. Furthermore, the design scheme of two kinds of multifunctional combined probe system, "external" and "built-in", is presented. The development of the above equipment will help to enhance the authenticity and reliability of the microscopic friction and wear test results under specific test conditions. The related research results not only help to enrich the basic theoretical system of nano-tribology, but also promote the further application of scanning probe technology.
【学位授予单位】：西南交通大学
【学位级别】：硕士
【学位授予年份】：2016
【分类号】：TH742

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