基于FPGA的高精度硅微谐振加速度计数据采集与参数补偿系统设计与实现

发布时间：2018-06-10 05:12

  本文选题：硅微谐振加速度计 + FPGA　； 参考：《中国惯性技术学报》2015年03期

【摘要】：硅微谐振加速度计因具有小体积优势和高精度潜力,成为硅微惯性传感器研制的热点之一。频率信号的高精度采集和系统参数补偿是提高硅微谐振加速度计性能的重要手段之一。在分析硅微谐振加速度计工作机理的基础上,从双路差动频率信号的精确采集和系统误差参数补偿角度出发,分析了数据采集的原理,提出了一种高精度硅微谐振加速度计用数据采集与参数补偿方法。给出了设计思路和电路实现方法,讨论了误差来源与改进方法。所设计的数据采集系统针对中心频率18 k Hz.,标度因数400 Hz/g,量程±20g的加速度计,数据更新周期200 ms下频率分辨率为0.0005 Hz,等效加速度分辨率达到1.25μg。测试表明,补偿后的硅微谐振加速度计,在全温(-40~+70℃)内,K0温度系数从262μg/℃降低到29.9μg/℃,K1变化量从4.18%降低到2.04‰,全量程非线性从7.16‰降低到0.128‰,系统参数满足设计指标。
[Abstract]:Silicon micro resonant accelerometers have become one of the hotspots in the development of silicon micro inertial sensors due to their small volume advantages and high precision potential. High precision acquisition of frequency signals and compensation of system parameters are one of the important methods to improve the performance of silicon microresonant accelerometers. Based on the analysis of the working mechanism of silicon micro-resonant accelerometer, the principle of data acquisition is analyzed from the angle of accurate acquisition of double-channel differential frequency signals and compensation of system error parameters. A method of data acquisition and parameter compensation for high precision silicon micro resonant accelerometer is presented. The design idea and circuit realization method are given, and the error source and improvement method are discussed. The designed data acquisition system is designed for an accelerometer with a central frequency of 18 kHz, a scaling factor of 400 Hz / g and a range of 卤20 g. The frequency resolution is 0.0005 Hz at 200ms and the equivalent acceleration resolution is 1.25 渭 g. The test results show that the temperature coefficient of K _ 0 is reduced from 262 渭 g / 鈩，

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