低空间频率组合计算全息元件检测深度非球面

发布时间：2018-06-12 00:45

本文选题：测量 + 干涉测量　；参考：《光学学报》2016年11期

【摘要】：计算全息元件(CGH)可实现光学非球面的零位干涉高精度检测,但深度非球面的非球面度以及非球面度梯度均较大,使检测所需CGH的局部空间频率偏大,加工困难。提出一种用组合CGH检测深度非球面的方法,该方法通过组合两个低空间频率CGH,实现深度非球面检测时所需的单个高空间频率CGH的功能。由一维线性光栅模型推导组合CGH与传统单个CGH空间频率的关系,并由此给出组合CGH初始相位,逐步优化可求得最佳相位。以最大非球面度193.434μm、最大非球面度梯度75.788μm/mm的深度非球面为测试样例,设计了单个CGH和组合CGH,残留波前误差均小于λ/250,组合CGH最大空间频率约为单个CGH的50%。设计了辅助装调CGH减小装调误差的影响,并分析了组合CGH之间俯仰倾斜偏差、中心偏差以及轴向定位偏差对检测精度的影响。
[Abstract]:CGH) can be used to detect the optical aspherical surface with high precision, but the asphericity and the asphericity gradient of the deep aspherical surface are large, which makes the local space frequency of CGH larger and the processing difficult. A method of detecting deep aspherical surface with combined CGH is proposed. By combining two low spatial frequency CGH, the function of single high spatial frequency CGH is realized when detecting deep aspheric surface. Based on the one-dimensional linear grating model, the relationship between the combined CGH and the traditional single CGH spatial frequency is derived, and the initial phase of the combined CGH is given, and the optimum phase can be obtained by step optimization. Taking the deep aspherical surface with the maximum asphericity of 193.434 渭 m and the maximum aspherical gradient of 75.788 渭 m/mm as an example, a single CGH and a combined CGH are designed. The residual wavefront errors are less than 位 / 250, and the maximum spatial frequency of the combined CGH is about 50 times of that of a single CGH. The influence of auxiliary assembly CGH to reduce the installation error is designed, and the influence of pitch tilt deviation, center deviation and axial positioning deviation between composite CGH on the detection accuracy is analyzed.
【作者单位】：南京理工大学电子工程与光电技术学院;
【基金】：国家自然科学基金(61377015,61505080) 江苏省自然科学基金(BK20150788)
【分类号】：TH74;O436.1

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