高光谱分辨率紫外平场光谱仪的研制

发布时间：2018-06-20 08:30

本文选题：光谱仪 + 球面光栅　；参考：《光谱学与光谱分析》2015年06期

【摘要】：光栅作为一重要的分光元件,广泛应用于各类光谱仪,其中球面变线距平场光栅以其独特的平场特性使其容易与阵列探测器结合使用,一次实现宽光谱范围的记录。商业球面平场光栅一般只会提供光栅的公称线密度以及相应的安装参数,而不会提供光栅具体的变线距参数,并且提供的安装参数是针对整个使用波段优化的结果。使用者往往只需要其中的一部分波段。针对这种情况,根据球面平场光栅聚焦、分光原理,利用生产厂家提供的光学元件安装参数给出了推导球面变线距光栅变线距参数的方法。并给出了利用这些参数,根据光谱仪的实际工作波段确定最佳的CCD安装位置的方法。根据推导的光栅变线距参数可以对光学系统进行光学追迹已验证光学系统的性能。研制了一台高分辨率紫外平场光谱仪,覆盖光谱范围230~280nm。采用的球面变线距光栅公称线密度为1 200lines·mm-1,使用波段为170~500nm。推导了该光栅的变线距参数,并针对230~280nm波段对CCD的安装位置进行了优化。同时利用不同元素的标准光源空心阴极灯对光谱仪进行了波长标定和光谱分辨率测试。波长标定采用参数拟合法,整个波段范围内的标定精度优于0.01nm。光谱分辨率测试的结果表明光谱仪的光谱分辨率达到0.08nm@280.20nm。
[Abstract]:As an important spectrometer, grating is widely used in various spectrometers, in which the spherical aberration field grating is easy to be used in combination with array detectors because of its unique flat field characteristics, so that the recording of wide spectral range can be realized at one time. Commercial spherical flat field gratings usually provide only the nominal linear density and the corresponding installation parameters of the grating, but not the specific variable line distance parameters of the grating, and the installation parameters are optimized for the whole band. Users often only need part of the band. In view of this situation, according to the focusing and splitting principle of spherical flat field grating, the method of deducing the variable line distance parameter of spherical variable-line-distance grating is given by using the installation parameters of optical element provided by the manufacturer. The method of determining the best CCD installation position according to the actual working band of the spectrometer is given by using these parameters. The performance of the optical system can be verified by optical tracing based on the variable line distance parameters derived from the grating. A high resolution UV flat field spectrometer with a spectral range of 230 nm and 280 nm has been developed. The nominal linear density of the spherical variable-line-distance grating is 1 200lines m ~ (-1), and the wavelength band is 170 ~ 500nm ~ (-1). The variable line distance parameters of the grating are derived, and the installation position of 230~280nm band is optimized. At the same time, the spectrometer was calibrated and the spectral resolution was measured by using the standard light source hollow cathode lamp with different elements. The calibration accuracy of wavelength calibration is better than that of 0.01 nm. The spectral resolution test results show that the spectral resolution of the spectrometer is 0.08nm@ 280.20nm.
【作者单位】：中国科学技术大学精密机械与精密仪器系;中国科学技术大学国家同步辐射实验室;
【基金】：国家重大科学仪器设备开发专项(2011YQ120023) 中央高校基本科研业务费专项资金项目(WK2310000038)资助
【分类号】：TH744.1

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