猫眼法绝对测量干涉仪出射波前

发布时间：2018-06-21 15:36

本文选题：测量 + 光学检测　；参考：《中国激光》2015年12期

【摘要】：由于非共光路误差是菲索干涉仪进行高精度检测中最重要的误差因素之一,而非共光路误差是由于非理想的光学系统即干涉仪的出射波前不理想造成的,所以为了测量干涉仪的出射波前来评估干涉仪非共光路误差的大小,提出一种利用干涉仪猫眼位置绝对测量干涉仪出射波前的方法。该方法基于干涉仪自身的面形测量功能,操作非常简单,只需要一块反射镜就能够实现干涉仪出射波前的测量。该方法通过至少三个猫眼位置的测量得到干涉仪出射波前的自身剪切数据,然后通过基于旋转平移的绝对检测算法直接得到干涉仪的出射波前的二维波前数据。实验结果表明:该方面能够实现不包括Power在内均方根(RMS)值约为15 nm的测量精度。该方法能够准确测量干涉仪出射波前,从而评估干涉仪非共光路误差。
[Abstract]:Because the non-common optical path error is one of the most important error factors in the high-precision detection of Fizo interferometer, and the non-common optical path error is caused by the non-ideal optical system, I. E. the non-ideal wavefront of the interferometer. So in order to measure the output wave of interferometer to evaluate the error of non-common optical path of interferometer, a method of absolute measurement of interferometer output wavefront by using the position of cat's eye of interferometer is proposed. The method is based on the surface shape measurement function of the interferometer itself, and the operation is very simple. Only one mirror is needed to measure the wavefront of the interferometer. In this method, at least three cat's eye positions are measured to obtain the self-shear data of the interferometer's outgoing wavefront, and then the two-dimensional wavefront data of the interferometer's outgoing wavefront are directly obtained by the absolute detection algorithm based on rotation translation. The experimental results show that the RMS value of RMS, which does not include Power, can be achieved with an accuracy of about 15 nm. This method can accurately measure the wavefront of interferometer and evaluate the non-common optical path error of interferometer.
【作者单位】：中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室超精密工程研究中心;
【基金】：国家科技重大专项(2009ZX02205)
【分类号】：TH744.3

【共引文献】