基于固体微片激光回馈干涉仪面内位移测量方法的研究

发布时间：2018-06-24 06:09

本文选题：面内位移 + 离面位移　；参考：《贵州大学》2016年硕士论文

【摘要】：微片激光回馈干涉仪具有灵敏度高、易准直、结构简单等优点,可以实现微小、轻薄、高温、易碎、极低反射率等特殊目标的非接触测量,在航天航空、精密测量、工程技术等领域都有非常广泛的应用。但是这些研究大多都只能测量离面位移,无法测量面内位移。在实际应用中很多设备、材料等都会产生面内位移,如材料的形变、MEMS器件的面内运动等,因此面内位移的测量在实际应用中有非常重要的意义。针对这一点,本文利用微片激光回馈干涉仪设计并搭建了面内位移测量系统,开展了粗糙表面激光回馈面内位移测量方法的研究。本文的主要研究工作包括以下几个方面:1、对国内外主要面内位移测量方法和研究现状进行了详细介绍,分析了激光回馈位移测量技术的特点,在此基础上提出了基于激光回馈技术的面内位移测量方法。2、在上述测量方法基础上,本文提出了面内位移测量系统的设计方案,包括光学单元、信号处理单元、软件单元,并按照设计方案搭建、调试了测量系统。光学单元中重点对激光器的出光特性进行了研究和测试,为系统的参数设定提供了基础。信号处理单元实现了信号的滤波、放大和鉴相。软件单元实现了电脑与系统的通信与控制,相位的解调,数据的显示、存储等功能。3、对测量系统进行了性能测试,根据实验结果进行了误差分析,并分析了误差产生的原因,在此基础上进一步优化了测量系统。4、利用优化系统时设计的光束准直方案,将之应用到微片激光回馈干涉仪中实现了远距离微小振动的检测,以扬声器表面为测量目标,在71.7米处可以较清晰还原声音信号。
[Abstract]:Microchip laser feedback interferometer has the advantages of high sensitivity, easy collimation, simple structure and so on. It can realize non-contact measurement of small, thin, high temperature, fragile, very low reflectivity and other special targets. Engineering technology and other fields have a very wide range of applications. However, most of these studies can only measure off-plane displacement, not in-plane displacement. In practical applications, many devices and materials will produce in-plane displacement, such as in-plane motion of MEMS devices, so in-plane displacement measurement is of great significance in practical applications. In order to solve this problem, the in-plane displacement measurement system is designed and built by using micro-chip laser feedback interferometer, and the method of laser feedback in-plane displacement measurement on rough surface is studied. The main research work of this paper includes the following aspects: 1. The main in-plane displacement measurement methods and research status at home and abroad are introduced in detail, and the characteristics of laser feedback displacement measurement technology are analyzed. On this basis, the in-plane displacement measurement method based on laser feedback technique is proposed. On the basis of the above measurement methods, the design scheme of in-plane displacement measurement system is proposed, including optical unit, signal processing unit, software unit, etc. According to the design scheme, the measurement system is debugged. The light output characteristics of laser are studied and tested in the optical unit, which provides the basis for the parameter setting of the system. The signal processing unit realizes signal filtering, amplification and phase discrimination. The software unit realizes the functions of communication and control between computer and system, demodulation of phase, display and storage of data, etc. The performance of the measurement system is tested, and the error analysis is carried out according to the experimental results, and the reasons for the error are analyzed. On this basis, the measurement system. 4 is further optimized. The beam collimation scheme designed when the system is optimized is applied to the micro chip laser feedback interferometer to realize the detection of remote micro vibration. The loudspeaker surface is taken as the measuring object. Sound signals can be restored more clearly at 71.7 m.
【学位授予单位】：贵州大学
【学位级别】：硕士
【学位授予年份】：2016
【分类号】：TH744.3

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