原子力显微镜探针悬臂弹性常数校正技术进展
发布时间：2018-07-29 09:35
【摘要】：利用原子力显微镜对材料表面的力学性能进行定量表征时,需要准确知道原子力显微镜探针悬臂的弹性常数,所以对弹性常数进行校正十分重要。该文综述近年来对探针悬臂弹性常数的校正方法,主要包括维度法、静态挠度法、动态挠度法。维度法对不同悬臂形状(主要针对矩形、V型)进行阐述,分析不同方法使用的数学模型与优缺点;静态挠度法不仅对方法的数学模型进行阐述,还着重介绍近年来对该方法精确度的改进研究;动态挠度法以附加质量法、Sader法与热调谐法分别阐述,比较3种方法的模型特点与先进性;最后分析常用探针适合使用的校正方法,对今后校正方法的发展提供参考。
[Abstract]:When the mechanical properties of material surface are quantitatively characterized by atomic force microscope (AFM), it is necessary to know exactly the elastic constant of the AFM probe cantilever, so it is very important to correct the elastic constant. In this paper, the methods for correcting the elastic constants of the probe cantilever are reviewed, including dimensional method, static deflection method and dynamic deflection method. The dimensional method describes the different cantilever shapes (mainly for rectangular, V-shaped), analyzes the mathematical models, advantages and disadvantages used by different methods, and the static deflection method not only describes the mathematical model of the method, This paper also introduces the improvement of the accuracy of the method in recent years, the dynamic deflection method is described by the additional mass method Sader method and the thermal tuning method, and the model characteristics and advanced nature of the three methods are compared. Finally, the calibration methods suitable for the use of common probes are analyzed, which provides a reference for the development of calibration methods in the future.
【作者单位】： 聚合物分子工程国家重点实验室复旦大学高分子科学系;
【基金】：聚合物分子工程国家重点实验室仪器类开放课题(KVH1717101/001/018)
【分类号】：TH742
本文编号：2152261
[Abstract]:When the mechanical properties of material surface are quantitatively characterized by atomic force microscope (AFM), it is necessary to know exactly the elastic constant of the AFM probe cantilever, so it is very important to correct the elastic constant. In this paper, the methods for correcting the elastic constants of the probe cantilever are reviewed, including dimensional method, static deflection method and dynamic deflection method. The dimensional method describes the different cantilever shapes (mainly for rectangular, V-shaped), analyzes the mathematical models, advantages and disadvantages used by different methods, and the static deflection method not only describes the mathematical model of the method, This paper also introduces the improvement of the accuracy of the method in recent years, the dynamic deflection method is described by the additional mass method Sader method and the thermal tuning method, and the model characteristics and advanced nature of the three methods are compared. Finally, the calibration methods suitable for the use of common probes are analyzed, which provides a reference for the development of calibration methods in the future.
【作者单位】： 聚合物分子工程国家重点实验室复旦大学高分子科学系;
【基金】：聚合物分子工程国家重点实验室仪器类开放课题(KVH1717101/001/018)
【分类号】：TH742
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1 宋云鹏;吴森;耿新宇;傅星;;具有溯源性的原子力显微镜探针法向弹性常数标定系统[J];纳米技术与精密工程;2014年04期
，本文编号：2152261
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