非旋转对称光学非球面（柱面）面形绝对检验技术研究

发布时间：2018-07-29 13:11

【摘要】：非旋转对称光学非球面元件,如柱面元件等,具有独特的光学特性,在天文、强激光等先进光学系统中得到了广泛应用。但因其非旋转对称的特点,尚未有高精度的绝对检测方法。计算全息元件(Computer-Generated Hologram,CGH)可以产生任意形状的波前,可实现复杂光学元件的零位干涉检测,但系统误差及参考误差的存在限制了计算全息法的检测精度。为了进一步提高检测精度,本文在计算全息零位检测技术的基础上,以非旋转对称光学非球面中的特例——柱面元件为研究对象,研究了基于共轭差分干涉术的面形绝对检验技术。主要研究内容有：针对一柱面元件,完成柱面补偿用CGH的设计与加工,搭建干涉测量装置,实现柱面元件的零位干涉检测；采用切比雪夫多项式对检测过程中的像差进行分析,实现了装调误差的分离。采用多种算法对待测面的微分波面进行复原仿真,得到待测柱面的绝对面形分布；相比于差分干涉法,共轭差分干涉法提高了面形复原精度,增强了测试可靠性；同时,通过叠加实际测试过程中存在的噪声、装调等误差,分析各类误差对复原精度的影响。运用正交双边对称位置测量的共轭差分法对柱面进行绝对干涉检测,设计具有七维调节功能的夹持调整机构,实现待测件的装调及共轭运动；对共轭差分干涉测量得到的微分波面进行波面复原,得到待测件的绝对面形；采用Taylor Hobson非球面轮廓仪对待测件特定位置进行测量,将两者结果进行比对,两者结果基本一致,其RMS值偏差优于1/40λ(λ=632.8nm)。
[Abstract]:Non-rotating symmetric optical aspheric elements such as cylindrical elements have unique optical properties and have been widely used in advanced optical systems such as astronomy and intense laser. However, due to its non-rotational symmetry, there is no high-precision absolute detection method. Computer-Generated Hologram-CGH can produce arbitrary wavefront and can detect the zero position interference of complex optical elements. However, the accuracy of CGH detection is limited by the existence of system error and reference error. In order to further improve the detection accuracy, the cylindrical element, a special case of non-rotational symmetric optical aspherical surface, is studied in this paper on the basis of the zero position detection technique of CGH. Based on conjugate differential interferometry, the absolute test technique of plane shape is studied. The main research contents are as follows: for a cylinder element, the design and processing of CGH for cylinder compensation are completed, the interference measurement device is built to realize the zero position interference detection of cylinder element, and the aberration in the detection process is analyzed by Chebyshev polynomial. The separation of the adjustment error is realized. The absolute surface distribution of cylinder is obtained by using many algorithms to restore the differential wavefront of measured plane. Compared with differential interferometry, conjugate differential interferometry improves the precision of surface restoration and enhances the reliability of measurement. The influence of various errors on the recovery accuracy is analyzed by superimposing the errors in the process of actual testing such as noise, adjustment and so on. By using the conjugate difference method of orthogonal bilateral symmetrical position measurement, the absolute interference detection of cylinder surface is carried out, and the clamping and adjusting mechanism with seven dimensional adjustment function is designed to realize the assembly and conjugate motion of the parts to be tested. The wavefront of the differential wave surface obtained by conjugate differential interferometry is restored to obtain the absolute surface shape of the object to be tested, and the Taylor Hobson aspheric profilometer is used to measure the specific position of the measuring piece, and the two results are compared, and the results are basically the same. The deviation of RMS value is better than 1 / 40 位 (位 = 632.8 nm).
【学位授予单位】：南京理工大学
【学位级别】：硕士
【学位授予年份】：2016
【分类号】：TH74

【相似文献】