基于平面气浮导轨误差均化原理的轮廓仪研制
发布时间：2018-10-18 19:15
【摘要】：近些年来,精密和超精密加工技术不断发展,这对精密测量仪器的精度、稳定性等方面提出了更高的要求。基于气浮导轨的运动精度高、摩擦小、稳定性好等优点,其被广泛应用到精密测量仪器中,轮廓仪即是精密测量仪器中的典型代表。探究气体误差均化效应作用规律及设计新型X-Y气浮运动平台成为如何提高轮廓仪测量精度需要研究的两个关键问题,具有重要的理论和实际意义。根据物体表面形貌的形成规律,采用函数拟合的方法对物体平面轮廓进行模拟,得出物体表面形貌的具体表达式,以此作为后续计算的数据储备。根据气体润滑轴承的基本方程式N-S方程、雷诺方程及气浮导轨的运动状态可以推导出平面气浮导轨的气体润滑控制方程,并得出其相应的边界条件。设置动气浮导轨位置参数,根据动气浮导轨平衡原理及动气浮导轨力学平衡条件列出力学—数学平衡方程。运用有限差的数值计算方法对相关方程进行离散化,在MATLAB环境下进行编程,采用超松弛迭代(SLOR)法,首先计算动气浮导轨在理论气膜厚度条件下的承载力,再以此承载力为初始条件,计算模拟物体表面形貌条件下的动导轨各个平衡位置参数值,之后运用最小包容法求出动导轨运动曲线的直线度误差值。根据无气体润滑状态动导轨运动原理,采用两点支撑平衡原理的计算方法求出无气体润滑状态下动导轨平衡状态运动曲线,进而也得出其直线度误差。为了更进一步探究气体的误差均化效应作用规律,分别计算了在不同波长轮廓条件、不同理论气膜厚度条件及不同运动位移条件下的误差均化效果。为更大效果的发挥气体的误差均化效应,设计了新型X-Y气浮运动平台,此结构简单,运动平稳,实现方便。运动平台以丝杠导轨为导向机构,以气浮为支撑,以气浮轴承为推动机构。首先对运动平台相关组件进行了选型及性能分析,之后,绘制关键部件零件图,确定了加工工艺方案,制造成样机,并搭建实验测试平台。设计了承载力探究试验方案,得出了承载力与气膜厚度关系规律；设计了运动误差探究实验方案,测试了不同供气压力条件下气浮平台的运动轨迹,编制最小包容法程序,评定直线度误差,通过多组实验数据对比,得出在实际工况条件下最佳误差均化效果的供气压力值,这对后续实践具有重要意义。
[Abstract]:In recent years, the development of precision and ultra-precision machining technology has put forward higher requirements on precision and stability of precision measuring instruments. Based on the advantages of high motion precision, small friction and good stability of air floating guide rail, it is widely used in precision measuring instruments, and the profilometer is a typical representative of precision measuring instruments. It is of great theoretical and practical significance to explore the law of homogenization effect of gas error and to design a new type of X-Y air-floating motion platform. It is necessary to study how to improve the measuring accuracy of the profilometer. According to the formation law of the surface topography of the object, the plane contour of the object is simulated by the method of function fitting, and the concrete expression of the surface topography of the object is obtained, which can be used as the data reserve for the subsequent calculation. According to the basic equations N-S equation, Reynolds equation and the motion state of air bearing, the governing equation of gas lubrication for plane air bearing can be deduced, and the corresponding boundary conditions can be obtained. According to the balance principle of the dynamic air flotation guide and the mechanical equilibrium condition of the dynamic air floating guide rail, the mechanical-mathematical equilibrium equation is set up by setting the position parameters of the dynamic air floating guide rail. The correlation equations are discretized by numerical method of finite difference, and programmed in MATLAB environment. The overrelaxation iterative (SLOR) method is used to calculate the bearing capacity of the dynamic air floating guideway under the condition of theoretical film thickness, first of all, the bearing capacity of the dynamic air floatation guideway is calculated under the condition of theoretical film thickness. Based on the initial condition of bearing capacity, the equilibrium position parameters of moving guideway under the condition of surface topography are calculated, and then the straightness error of the moving guide rail motion curve is obtained by using the minimum inclusion method. According to the motion principle of the moving guideway in the condition of no gas lubrication, the motion curve of the equilibrium state of the moving guideway under the condition of no gas lubrication is obtained by using the calculation method of the two-point support balance principle, and the straightness error is also obtained. In order to further explore the law of error homogenization effect of gas, the error homogenization effect is calculated under different wavelength profile conditions, different theoretical film thickness conditions and different moving displacement conditions. In order to give full play to the error homogenization effect of gas, a new X-Y floatation platform is designed, which has the advantages of simple structure, steady motion and convenient realization. The motion platform takes the lead screw guide rail as the guiding mechanism, the air-floated bearing as the support and the air-bearing as the driving mechanism. First of all, the selection and performance analysis of the components related to the motion platform are carried out. Then, the part drawing of the key components is drawn, the processing technology scheme is determined, the prototype is manufactured, and the experimental test platform is built. The bearing capacity inquiry test scheme is designed, the relationship between bearing capacity and film thickness is obtained, the motion error investigation experiment scheme is designed, the motion track of air floating platform under different air supply pressure is tested, and the program of minimum containment method is compiled. To evaluate the straightness error, through comparing the experimental data of many groups, the gas supply pressure value of the best error homogenization effect under the actual working condition is obtained, which is of great significance to the subsequent practice.
【学位授予单位】：西安工业大学
【学位级别】：硕士
【学位授予年份】：2016
【分类号】：TH703.4
本文编号：2280114
[Abstract]:In recent years, the development of precision and ultra-precision machining technology has put forward higher requirements on precision and stability of precision measuring instruments. Based on the advantages of high motion precision, small friction and good stability of air floating guide rail, it is widely used in precision measuring instruments, and the profilometer is a typical representative of precision measuring instruments. It is of great theoretical and practical significance to explore the law of homogenization effect of gas error and to design a new type of X-Y air-floating motion platform. It is necessary to study how to improve the measuring accuracy of the profilometer. According to the formation law of the surface topography of the object, the plane contour of the object is simulated by the method of function fitting, and the concrete expression of the surface topography of the object is obtained, which can be used as the data reserve for the subsequent calculation. According to the basic equations N-S equation, Reynolds equation and the motion state of air bearing, the governing equation of gas lubrication for plane air bearing can be deduced, and the corresponding boundary conditions can be obtained. According to the balance principle of the dynamic air flotation guide and the mechanical equilibrium condition of the dynamic air floating guide rail, the mechanical-mathematical equilibrium equation is set up by setting the position parameters of the dynamic air floating guide rail. The correlation equations are discretized by numerical method of finite difference, and programmed in MATLAB environment. The overrelaxation iterative (SLOR) method is used to calculate the bearing capacity of the dynamic air floating guideway under the condition of theoretical film thickness, first of all, the bearing capacity of the dynamic air floatation guideway is calculated under the condition of theoretical film thickness. Based on the initial condition of bearing capacity, the equilibrium position parameters of moving guideway under the condition of surface topography are calculated, and then the straightness error of the moving guide rail motion curve is obtained by using the minimum inclusion method. According to the motion principle of the moving guideway in the condition of no gas lubrication, the motion curve of the equilibrium state of the moving guideway under the condition of no gas lubrication is obtained by using the calculation method of the two-point support balance principle, and the straightness error is also obtained. In order to further explore the law of error homogenization effect of gas, the error homogenization effect is calculated under different wavelength profile conditions, different theoretical film thickness conditions and different moving displacement conditions. In order to give full play to the error homogenization effect of gas, a new X-Y floatation platform is designed, which has the advantages of simple structure, steady motion and convenient realization. The motion platform takes the lead screw guide rail as the guiding mechanism, the air-floated bearing as the support and the air-bearing as the driving mechanism. First of all, the selection and performance analysis of the components related to the motion platform are carried out. Then, the part drawing of the key components is drawn, the processing technology scheme is determined, the prototype is manufactured, and the experimental test platform is built. The bearing capacity inquiry test scheme is designed, the relationship between bearing capacity and film thickness is obtained, the motion error investigation experiment scheme is designed, the motion track of air floating platform under different air supply pressure is tested, and the program of minimum containment method is compiled. To evaluate the straightness error, through comparing the experimental data of many groups, the gas supply pressure value of the best error homogenization effect under the actual working condition is obtained, which is of great significance to the subsequent practice.
【学位授予单位】：西安工业大学
【学位级别】：硕士
【学位授予年份】：2016
【分类号】：TH703.4
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