大口径光学精密检测平台空间误差的计算方法
发布时间：2018-11-28 20:05
【摘要】：针对大口径光学元件精密检测平台空间误差难以直接测量的问题,提出了一种空间误差计算方法.首先,将空间误差分解为平面内两轴联动误差和该平面沿第三轴运动所引起的误差;其次,利用上述两项误差,基于多项式拟合和平面几何相关理论,求解出空间误差值;运用球杆仪、激光干涉仪等设备对于模型中所涉及的多项几何误差进行测量,计算得到检测平台的空间误差值为-5.22~5.80μm;为验证本方法的正确性,以泰勒霍普森的Form Talysurf PGI 1240轮廓仪的校准半球为基准进行测量,测量结果为半球半径的误差值为-5.02~5.37μm,与计算得到的空间误差结果一致,证明了该方法的正确性和有效性.
[Abstract]:In order to solve the problem that it is difficult to directly measure the spatial error of the precision measuring platform of large aperture optical element, a method of calculating spatial error is proposed. Firstly, the spatial error is decomposed into the two axis linkage error in the plane and the error caused by the plane moving along the third axis, secondly, the spatial error is solved by using the above two errors based on polynomial fitting and plane geometry correlation theory. The geometric errors involved in the model are measured by means of a ball rod instrument and a laser interferometer, and the spatial error of the detection platform is calculated to be -5.22 ~ 5.80 渭 m. In order to verify the correctness of this method, the calibration hemispheres of Taylor Hopson's Form Talysurf PGI 1240 profilometer are used as the reference. The error of the measurement is -5.02 ~ 5.37 渭 m, which is consistent with the calculated spatial error. The correctness and validity of the method are proved.
【作者单位】： 厦门大学物理与机电工程学院;
【分类号】：TH741
本文编号：2364114
[Abstract]:In order to solve the problem that it is difficult to directly measure the spatial error of the precision measuring platform of large aperture optical element, a method of calculating spatial error is proposed. Firstly, the spatial error is decomposed into the two axis linkage error in the plane and the error caused by the plane moving along the third axis, secondly, the spatial error is solved by using the above two errors based on polynomial fitting and plane geometry correlation theory. The geometric errors involved in the model are measured by means of a ball rod instrument and a laser interferometer, and the spatial error of the detection platform is calculated to be -5.22 ~ 5.80 渭 m. In order to verify the correctness of this method, the calibration hemispheres of Taylor Hopson's Form Talysurf PGI 1240 profilometer are used as the reference. The error of the measurement is -5.02 ~ 5.37 渭 m, which is consistent with the calculated spatial error. The correctness and validity of the method are proved.
【作者单位】： 厦门大学物理与机电工程学院;
【分类号】：TH741
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