基于粘滑原理纳米定位平台的设计和分析

发布时间：2019-04-07 19:43

【摘要】：为了能实现跨尺度纳米定位操作,研制了一个基于粘滑驱动机理的纳米定位平台。采用柔性铰链的驱动机构,在对其在垂直方向上和驱动方向上的刚度进行分析的基础上,进行尺寸优化,从而减少定位平台在垂直方向产生耦合运动。致动器采用叠堆型压电陶瓷,实验分析发现压电陶瓷驱动器在有预紧力作用下,实际位移输出小于标称位移,当预紧力越大时,压电陶瓷的实际输出位移越小。在导向方面,采用双列交叉滚柱导轨,实现了载物台的多样化设计,从而提高了定位平台的适用性。同时结合LuGre摩擦模型对定位平台进行了动力学分析,优化其结构设计。单自由度粘滑驱动纳米定位平台的最大尺寸为28 mm×34 mm×12 mm,具有10 nm的分辨率、0.021 mm/s的速度和10 mm的行程。
[Abstract]:In order to realize the operation of cross-scale nano-positioning, a nano-positioning platform based on stick-slip driving mechanism was developed. Based on the analysis of the stiffness in the vertical direction and the driving direction of the flexible hinge drive mechanism, the dimension optimization is carried out to reduce the coupling motion of the positioning platform in the vertical direction. The actuator adopts stacked piezoelectric ceramic. Experimental analysis shows that the actual displacement output of piezoelectric actuator is smaller than that of nominal displacement under the action of pre-tightening force, and the smaller the actual output displacement of piezoelectric ceramic is when the pretightening force is greater. In the aspect of guidance, double row cross roller guide is adopted to realize the diversified design of the platform, thus improving the applicability of the positioning platform. At the same time, the dynamic analysis of the positioning platform is carried out based on the LuGre friction model, and the structural design of the platform is optimized. The maximum size of the single-degree-of-freedom stick-slip driven nano-positioning platform is 28 mm 脳 34 mm 脳 12 mm, with a resolution of 10 nm, a speed of 0.021 mm/s and a stroke of 10 mm.
【作者单位】：苏州大学机器人与微系统研究中心&苏州纳米科技协同创新中心;
【基金】：国家重大科研仪器设备研制专项(61327811) 国家自然科学基金资助项目(61233010) 江苏省杰出青年基金项目(BK2012005)
【分类号】：TH703

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