AFM微悬臂梁探针弹性常数各种标定方法的比较与分析

发布时间：2019-04-10 14:20

【摘要】：微悬臂梁探针是基于原子力显微镜(AFM)的微纳尺度力学测试中重要的力传感元件,其弹性常数的准确程度直接影响力学测量结果的可靠性。但是,目前已有的众多标定微悬臂梁探针弹性常数的方法都有各自的局限性,且准确性各异,因此需要对各种方法进行对比来选择出最佳方法。选取三种商用悬臂梁探针利用本实验室搭建的基于天平法的可溯源微悬臂梁探针弹性常数标定仪对其法向弹性常数进行标定,之后再将相同悬臂梁用三种常用标定方法(尺寸参数法,Sader法,热噪声法)进行再次标定。对不同方法测量结果进行比较,分析并详细讨论每种方法的优缺点与适用范围。结果表明相比于其他方法,微悬臂梁探针弹性常数标定仪(天平法)可测范围广,精度高,可溯源,可成为精确标定各种悬臂梁探针弹性常数的最佳方法之一。
[Abstract]:Micro-cantilever beam probe is an important force sensor in micro-and nano-scale mechanical measurement based on atomic force microscope (AFM). The accuracy of elastic constant directly affects the reliability of mechanical measurement results. However, there are many methods to calibrate the elastic constant of micro-cantilever beam probe, which have their own limitations and different accuracy. Therefore, it is necessary to compare the various methods to select the best method. Three kinds of commercial cantilever beam probes are selected to calibrate the normal elastic constants of the microcantilever beam probes based on the balance method, which is built in our laboratory, and is used to calibrate the normal elastic constants of the microcantilever beam probes, which can be used to calibrate the normal elastic constants. Then the same cantilever beam is calibrated again by three kinds of calibration methods (size parameter method, Sader method and thermal noise method). The measurement results of different methods are compared, and the advantages and disadvantages of each method are analyzed and discussed in detail. The results show that compared with other methods, the microcantilever probe elastic constant calibrator (balance method) has the advantages of wide measuring range, high precision and traceability. It can be one of the best methods to accurately calibrate the elastic constants of various cantilever beam probes.
【作者单位】：天津大学精密测试技术及仪器国家重点实验室;
【基金】：国家自然科学基金项目(61204117)
【分类号】：TH742;TP212

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