大型衍射光栅刻划机拉杆结构的分析与改进

发布时间：2019-04-19 13:08

【摘要】：由于大型衍射光栅刻划机刻划系统的双拉杆结构不能使其满足精度指标要求,本文设计了一套单拉杆结构。讨论了石英导轨分度方向弯曲误差产生的原因及其减小该误差的方法,分析和比较了两种拉杆结构的鞍型滑块的受力情况。基于材料力学弯曲变形理论,建立了石英导轨分度方向弯曲误差模型。在该模型的基础上仿真了双、单拉杆结构下刻划系统的石英导轨在分度方向上的弯曲变形误差。最后,使用双频激光干涉仪对石英导轨上的两个特征测量点进行了测量。测量结果显示:改进后的拉杆结构使得石英导轨在两特征测量点处的位移误差由50.36nm降低到小于10nm,满足大型衍射光栅刻划机刻划系统在分度方向上5~10nm的精度指标要求。
[Abstract]:Because the double tension bar structure of the large diffraction grating engraving system can not meet the requirement of precision, a set of single pull bar structure is designed in this paper. This paper discusses the causes of the bending error in the indexing direction of quartz guideway and the methods to reduce the error, and analyzes and compares the stress of the saddle-shaped sliders with two kinds of pull-bar structures. Based on the bending deformation theory of material mechanics, the bending error model of quartz guideway in indexing direction is established. On the basis of this model, the bending deformation error of quartz guideway in the indexing direction is simulated under the double and single pull bar structure. Finally, two characteristic measurement points on quartz guideway are measured by dual-frequency laser interferometer. The measurement results show that the displacement error of quartz guideway at two characteristic measuring points is reduced from 50.36nm to less than 10 nm with the improved strut structure, which meets the precision requirement of 5~10nm in the indexing direction of large-scale diffraction grating engraving system.
【作者单位】：中国科学院长春光学精密机械与物理研究所;
【基金】：国家重大科研装备研制项目(No.ZBY2008-1) 国家重大科学仪器设备开发专项资助项目(No.11YQ120023) 吉林省重大科技攻关项目(No.09ZDGG005) 国家973重点基础研究发展计划资助项目(No.2014CB049500) 长春市科技计划资助项目(No.Y3B43HU140)
【分类号】：TH74

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