基于硅悬臂高阶谐振的动态原子力显微镜的快速扫描

发布时间：2019-04-19 19:13

【摘要】：利用原子力显微镜(AFM)硅悬臂器件具有多阶谐振模态的特性,提出了基于硅悬臂高阶谐振特性构建动态AFM来实现快速扫描的方法,并研制了可工作于一阶模态和高阶模态的AFM。介绍了高阶谐振AFM系统的基本结构和工作原理,从理论上证明了利用硅悬臂梁高阶谐振特性实现快速扫描的可行性。以自制的AFM为研究对象,分析了影响动态AFM扫描速度的主要因素,对系统各模块的响应时间进行了分析、测试,并通过实验证明了AFM在二阶谐振模态下的稳定时间明显小于一阶谐振模态下的稳定时间。最后,分别用一阶、二阶谐振模态对光栅试样在同一区域的表面形貌进行了扫描测试,测试数据表明:在相同条件下,AFM的扫描速度在二阶谐振模态下约是一阶模态下的3.3倍。理论分析和实验结果证明了利用高阶谐振探针提高AFM扫描速度的可行性和有效性。
[Abstract]:Based on the characteristics of multi-order resonant modes of atomic force microscope (AFM) silicon cantilever devices, a method of constructing dynamic AFM based on high-order resonant characteristics of silicon cantilever is proposed to realize fast scanning. And the AFM. which can work in the first and higher order modes is developed. The basic structure and working principle of high-order resonant AFM system are introduced in this paper. The feasibility of using high-order resonant characteristics of silicon cantilever beam to realize fast scanning is proved theoretically. Taking the self-made AFM as the research object, the main factors affecting the scanning speed of dynamic AFM are analyzed, and the response time of each module of the system is analyzed and tested. It is proved by experiments that the stability time of AFM in the second-order resonant mode is obviously shorter than that in the first-order resonant mode. Finally, the first-order and second-order resonant modes are used to scan the surface morphology of the grating specimen in the same region. The experimental data show that under the same conditions, the surface morphology of the grating sample is measured in the same region. The scanning speed of AFM is about 3.3 times that of the first mode in the second order resonant mode. The theoretical analysis and experimental results prove the feasibility and effectiveness of using high-order resonant probe to improve the scanning speed of AFM.
【作者单位】：合肥工业大学仪器科学与光电工程学院;
【基金】：国家自然科学基金资助项目(No.50975075)
【分类号】：TH742.9

【参考文献】