迈克尔逊光纤传感器及悬臂梁光纤传感器的高温传感特性研究

发布时间：2017-12-27 20:30

本文关键词：迈克尔逊光纤传感器及悬臂梁光纤传感器的高温传感特性研究　出处：《深圳大学》2016年硕士论文　论文类型：学位论文

【摘要】：自从20世纪60年代,高琨等人提出了将纤维波导作为光传导介质,70年代美国Corning公司制造出第一根低损耗单模光纤至今,光通信技术发展迅速,成为当今信息时代的支柱产业之一。光纤传感技术作为光通信技术里面的一个分支,也受到越来越多的关注。本论文主要研究了光纤迈克尔逊干涉型传感器,并在此基础上进一步优化提出并验证了基于两套光干涉叠加的光纤悬臂梁传感器,通过实验研究了其高温传感特性。本论文的主要内容为:1.对光纤传感器进行了分类说明,介绍了迈克尔逊光纤传感器的研究现状,并从制作工艺上进行了简单分类。2.利用飞秒激光在单模光纤切割45°倾斜光纤端面,制作了迈克尔逊高温传感器,并研究了其高温传感特性。由于45°倾斜光纤端面满足全内反射,光经过45°倾斜光纤端面将分成两束光,一束光直接原路返回,另外一束光经过3次反射返回到纤芯,形成迈克尔逊干涉仪。表明了45°倾斜光纤端面迈克尔逊传感器具有非常好的重复性与稳定性。传感探头在室温到800?C温度范围内响应曲线呈现非线性。在600?C传感探头的温度灵敏度为19.7 pm/?C,测量温度的精度为4.1?C。3.利用飞秒激光在细芯光纤(纤芯尺寸4μm)切割45°倾斜光纤端面,制作了迈克尔逊高温传感器,研究其高温传感特性。从100?C到900?C,传感器反射谱波谷随温度的升高红移,温度响应曲线呈现非线性。100?C到300?C温度灵敏度为9.2 pm/?C;300?C到600?C温度灵敏度为20.5 pm/?C;600?C到900?C温度灵敏度为47.5 pm/?C。4.利用飞秒激光在单模光纤制作了45°悬臂梁高温传感器,反射谱是由两套光干涉叠加而成,形成干涉谱主要是由45°倾斜端面形成的迈克尔逊干涉及空气腔形成的法布里-珀罗干涉。从室温到1000?C温度灵敏度为17 pm/?C左右,3次温度循环实验表明45°悬臂梁传感器具有良好的重复性、高温稳定性及波长的稳定性。45°悬臂梁高温传感器的有效传感端面得到了保护,可以耐受更高温度。5.利用飞秒激光在单模光纤制作了90°悬臂梁高温传感器,反射谱是两套法布里-珀罗干涉叠加的结果。室温到200?C,温度灵敏度为10 pm/?C左右;200?C到800?C,温度灵敏度为17 pm/?C左右。
[Abstract]:Since 1960s, high Kun et al. Proposed the fiber waveguide as the transmission medium of light in 70s, American Corning company produced the first low loss single-mode fiber has the rapid development of optical communication technology, has become one of the pillar industries in the information age. As a branch of optical communication technology, optical fiber sensing technology has attracted more and more attention. The fiber optic Michelson interferometer sensor is mainly studied in this paper. On the basis of it, we further optimize, and propose and verify the two fiber optic interference superposition based fiber cantilever sensor. The main contents of this paper are as follows: 1., classification and explanation of fiber optic sensors are introduced. The research status of Michelson optical fiber sensor is introduced, and simple classification is made from manufacturing technology. 2. the Michelson high temperature sensor was fabricated by using femtosecond laser to cut the end of 45 DEG fiber in single mode fiber, and its high temperature sensing characteristics were studied. Because the 45 degree tilt fiber end meets the total internal reflection, the light will be divided into two beams through the 45 degree tilt fiber end. A beam of light will return directly to the original path. The other beam will return to the core after 3 times of reflection, and form the Michelson interferometer. It shows that the 45 degree tilt optical fiber end face Michelson sensor has very good repeatability and stability. The response curve of the sensing probe is nonlinear at room temperature to 800? C temperature range. The temperature sensitivity of the 600? C sensor is 19.7 pm/? C, and the precision of the measured temperature is 4.1? C. 3. the Michelson high temperature sensor was fabricated by using a femtosecond laser in a fine core fiber (core size 4 m) to cut the end of 45 deg. high temperature sensor, and the high temperature sensing characteristics were studied. From 100? C to 900? C, the spectral wave valley of the sensor redshifts with the increase of temperature, and the temperature response curve is nonlinear. 100? C to 300? C temperature sensitivity is 9.2 pm/? C; 300? C to 600? C temperature sensitivity is 20.5 pm/? C; 600? C to 900? C temperature sensitivity is 47.5 pm/? C. 4., the 45 degree cantilever high temperature sensor is fabricated on single-mode fiber by femtosecond laser. The reflection spectrum is formed by two sets of optical interference superposition. The interference spectrum is formed by the Michelson interference formed by the 45 degree inclined end surface and the Fabri Perot interference formed by the air cavity. From room temperature to 1000? C, the temperature sensitivity is about 17 pm/? C. The 3 temperature cycle test shows that the 45 degree cantilever sensor has good repeatability, high temperature stability and wavelength stability. The effective sensing end of the 45 degree cantilever beam high temperature sensor is protected and can withstand the higher temperature. 5. the high temperature sensor of a 90 degree cantilever beam was fabricated by a femtosecond laser in a single mode fiber. The reflection spectrum is the result of the superposition of two sets of Fabri Perot interference. Room temperature to 200? C, temperature sensitivity of 10 pm/? C; 200? C to 800? C, temperature sensitivity of 17 pm/? C.
【学位授予单位】：深圳大学
【学位级别】：硕士
【学位授予年份】：2016
【分类号】：TP212

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