寄生式时栅位移传感器测量原理与结构优化

发布时间：2018-01-04 00:18

本文关键词：寄生式时栅位移传感器测量原理与结构优化　出处：《仪器仪表学报》2016年05期 　论文类型：期刊论文

【摘要】：大型机床在实现全闭环数控过程中,现有测量方法存在回转工作台无法同轴安装角编码器、安装要求高、精度无法保证等方面问题,本文提出一种适用于大型、中空回转工作台角度测量的寄生式时栅位移传感器。传感器通过在两路空间正交的励磁线圈中通入两相时间正交的励磁信号,利用磁导调制方法得到相位差直接反映空间转角的电行波信号,从而实现精密角位移测量。建立由4个传感单元组成的传感器模型,采用电磁场有限元仿真软件建模并仿真,对仿真结果进行误差分析和溯源;根据分析结果对传感器进行结构优化并仿真验证;根据优化模型制作传感器实物,搭建试验台进行实验验证。实验结果表明,在整周范围内传感器测量精度达到±2″,实现了高精度测量,为寄生式时栅的进一步开发应用提供了理论依据。
[Abstract]:In the implementation of large machine closed loop NC process, the existing measuring method of rotary table to coaxial installation angle encoder, installation requirements, accuracy and other aspects of the problem, this paper presented a suitable large, parasitic hollow rotary table angle measurement of time grating displacement sensor. The sensor through the excitation coil in the two excitation signal the pass into the two-phase orthogonal space time orthogonal modulation method, using magnetic phase difference directly reflects the electrical traveling wave signal space angle, so as to realize precision angular displacement measurement sensor. A model consisting of 4 sensor unit, the electromagnetic finite element simulation software modeling and simulation, error analysis and traceability of the simulation results according to the analysis results of the sensor; structure optimization and simulation; optimization model according to the experiment of sensor, The experimental results show that the accuracy of the sensor reaches to + 2 "in the whole range, which achieves high accuracy measurement. It provides a theoretical basis for further development and application of parasitic time grating.

【作者单位】：重庆大学机械传动国家重点实验室;重庆理工大学机械检测技术与装备教育部工程研究中心;
【基金】：国家自然科学基金(51405049,51505052) 重庆市科技研发基地能力提升计划(cstc2014pt-sy40002) 重庆“两江学者”项目资助
【分类号】：TP212
【正文快照】： 1引言随着国民经济的快速发展,各行各业对机械产品的加工精度要求越来越高,也催生着加工机床向精密、超精密方向发展[1-2]。影响机床实现精密加工的因素很多,其中全闭环检测是提高机床加工精度的重要方面。现今应用较多的全闭环检测方法是在末端传动部件上同轴安装高精度编码

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