光线扫描超分辨率精密表面干涉在线测量系统研究

发布时间：2018-02-27 12:21

本文关键词： 表面测量线扫描测量干涉测量光谱色散在线测量超分辨率测量　出处：《北京交通大学》2017年博士论文　论文类型：学位论文

【摘要】：随着先进制造、航空航天、光学、生物医学、材料、微电子、微机电系统等领域的发展,出现了很多精密和超精密表面。这些精密和超精密表面在很大程度上决定了产品的使用性能,对这些表面进行高精度测量对产品的设计、制造及使用具有重要意义。各领域的发展需要对这些精密和超精密表面进行非接触、高精度、快速、在线测量。现有测量方法难以满足这些测量需求。针对这一现状,本论文提出并研究了光线扫描超分辨率精密表面干涉在线测量系统,可以对精密及超精密表面进行非接触、高精度、快速、在线测量。研究的测量系统包括光线扫描精密表面干涉测量系统、反馈稳定系统和超横向分辨率测量系统三个部分。首先,提出并研究了光线扫描精密表面干涉测量系统,将宽带光源发出的光色散成波长在垂直于光波传播方向连续分布的平行光片,将此光片聚焦成光线扫描被测表面,实现了对被测表面的非接触、高精度、快速测量。第二,为了使研制的干涉测量系统适合在线测量,研究了反馈稳定系统,对环境干扰对干涉测量系统的影响进行修正补偿,提高干涉测量系统的抗干扰能力,使之适合在线测量。第三,为了提高测量系统的横向分辨率,研究了一维振幅型光瞳滤波器,利用一维振幅型光瞳滤波器使测量系统的横向分辨率突破了光波的衍射极限,实现了超横向分辨率测量。最后,研究了光线扫描超分辨率精密表面干涉在线测量系统,实现了对精密表面的非接触、高精度、快速、超分辨、在线测量,满足各领域的发展对精密和超精密表面提出的测量要求。本论文的主要创新如下:1.提出了光线扫描精密表面三维干涉测量系统,只需一维扫描即可完成精密表面三维测量。与点扫描测量方式相比,光线扫描测量方式极大地提高了测量速度,扫描机构简单,简化了测量系统,降低了成本;测量系统结构的简化还减少了误差源,为高精度测量打下了坚实的基础。2.光线扫描被测表面时,入射到被测表面不同被测点的光波波长不同且固定不变,测量结果能准确溯源到波长基准。利用闪耀光栅对宽带光源发出的光进行色散,形成波长在垂直于光波传播方向连续分布的平行光片,此平行光片经聚焦后对被测表面进行线扫描测量,只要各光学元件的空间位置固定,被测表面不同被测点接收到的波长就固定不变,不受光源光谱漂移的影响,因此,测量结果能准确溯源到波长基准。3.设计了反馈稳定系统以补偿环境干扰的影响,实现对干涉仪的稳定,使测量系统适合在线测量。4.设计了一维振幅型光瞳滤波器,对聚焦后扫描光线的宽度进行压缩,使光线宽度方向的横向分辨率突破了光波衍射极限的限制,实现超横向分辨率测量。
[Abstract]:With the development of advanced manufacturing, aerospace, optics, biomedicine, materials, microelectronics, MEMS and so on, There are many precision and ultra-precision surfaces. These precision and ultra-precision surfaces largely determine the performance of the product, and the design of the product is measured with high precision on these surfaces. Manufacturing and use are of great significance. The development of various fields requires non-contact, high-precision, fast, on-line measurement of these precision and ultra-precision surfaces. Existing methods of measurement are difficult to meet these measuring requirements. In this paper, an on-line measurement system of ray-scanning super-resolution precision surface interferometry is proposed and studied. The system can perform non-contact, high-precision and fast surface measurement for precision and ultra-precision surfaces. On-line measurement. The measurement system is composed of three parts: ray-scanning precise surface interferometry system, feedback stabilization system and super-lateral resolution measurement system. Firstly, a ray-scanning precision surface interferometry system is proposed and studied. The optical dispersion emitted by the broadband light source is transformed into a parallel film whose wavelength is continuously distributed in the direction perpendicular to the propagation direction of the light wave. The light sheet is focused to scan the measured surface, which realizes the non-contact, high precision and fast measurement of the measured surface. In order to make the interference measurement system suitable for on-line measurement, the feedback stabilization system is studied, and the influence of environmental interference on the interference measurement system is corrected and compensated, and the anti-interference ability of the interference measurement system is improved. Third, in order to improve the lateral resolution of the measurement system, the one-dimensional amplitude pupil filter is studied, and the transverse resolution of the measurement system exceeds the diffraction limit of the optical wave by using the one-dimensional amplitude pupil filter. Finally, the on-line measurement system of ray-scanning super-resolution precision surface interference is studied, and the non-contact, high-precision, fast, super-resolution, on-line measurement of the precision surface is realized. The main innovation of this paper is as follows: 1. A 3D interferometry system for ray-scanning precision surfaces is proposed. Compared with the point scanning method, the ray-scanning method can greatly improve the measuring speed, the scanning mechanism is simple, the measuring system is simplified, and the cost is reduced. The simplification of the structure of the measurement system also reduces the error source, which lays a solid foundation for high precision measurement. When light scans the measured surface, the wavelengths of the light waves incident to different measured points on the measured surface are different and fixed. The measured results can be traced to the wavelength reference accurately. The blazed grating is used to dispersion the light emitted by the broadband light source, and a parallel optical film with continuous wavelength distribution perpendicular to the direction of the light wave propagation is formed. After focusing, the measured surface is measured by linear scanning. As long as the spatial position of each optical element is fixed, the wavelength received at different measured points on the measured surface will be fixed, and will not be affected by the spectral drift of the light source. The measurement results can be traced to the wavelength reference .3.The feedback stabilization system is designed to compensate for the influence of environmental interference, and the stability of the interferometer is realized. The measurement system is suitable for on-line measurement .4.One-dimensional amplitude pupil filter is designed. The width of scanning light after focusing is compressed to make the transverse resolution of the width of light break the limit of diffraction limit of light wave and realize the measurement of super transverse resolution.
【学位授予单位】：北京交通大学
【学位级别】：博士
【学位授予年份】：2017
【分类号】：TP274

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