基于块状金刚石NV色心的纳米结构及纳米传感器

发布时间：2018-03-20 15:15

本文选题：金刚石　切入点：氮空位　出处：《中国科学技术大学》2017年博士论文　论文类型：学位论文

【摘要】：近年来,随着人们对人工合成单晶块状金刚石技术的掌握,对于金刚石光学工程,主要包括对基于金刚石的纳米技术的研究,也越来越多。而且其中基于金刚石中NV色心的研究,在量子信息技术领域和量子精密测量领域被学术界广泛重视。因为在室温条件下就具有稳定的光子发射和长的消相干时间等特性,NV色心已经被应用并作为目前实现量子计算机与量子信息技术的重要候选者。NV色心的电子自旋状态可以为量子计算提供有希望的固体量子位之一。此外,NV色心可以作为电磁场,温度和压力的纳米传感器,因为其中电子自旋的量子态对于外部环境非常敏感。这在生物学等方面已得到很好的应用。本文从实际工作出发,主要取得以下四个方面成果:1.以半导体工艺、有限元仿真为主要手段,研究基于块状金刚石NV色心的单光子源器件的制备,成功加工出了几种微纳器件,包括:纳米线、固体浸没透镜、圆形靶心环光栅、微盘和自支撑薄膜。还分别在块状金刚石和纳米线上实现了人工制备单个NV色心。从而获得了基于块状金刚石材料微纳加工方面的工作及经验。2.对金刚石纳米线NV色心单光子源进行了实验分析,证明了这种锥形纳米线,相比块状金刚石,能以7倍增幅提高共聚焦实验系统对NV色心的单光子收集效率,而且单光子计数率可以到564kcps。可以应用这种具有高光子通量的纳米线单光子器件来提高量子信息处理的性能。更重要的是,还可以为纳米级传感与测量提供有效的解决方案。3.通过基于块状金刚石中的NV色心探测局域光场的光学远场显微镜技术,实现了对金刚石表面微纳结构的超分辨率成像。该技术将块状金刚石中人工制备的密集NV色心阵列作为近场光学探针。其局域光场通过金刚石表面上的纳米结构传输,并利用NV色心的电荷状态转换来测量。而电荷状态损耗型纳米显微技术可以实现6.1 nm的空间分辨率的氮空色心位置测量,所以,金刚石表面上的纳米结构也被以低于光学衍射极限的分辨率被成像。该结果提供了一种构建通用光学超分辨率显微镜技术的方法和用于具有NV色心高空间分辨率传感的便利平台。4.通过对微波器件的仿真,优化,处理和封装研究,为基于NV色心的量子传感的光学远场超分辨率显微镜技术提供了集成高品质因子微波天线的纳米传感器。此外,本文还说明了计算机视觉等人工智能技术在实验检测和样品制备中的应用,并开源相关程序为其他类似研究工作提供了参考和技术积累。上述四个方面成果,都是紧密围绕NV色心纳米传感这个目标进行的多方面多角度的研究。本文中无论是对纳米尺寸的传感器的研究,还是研究对目标进行纳米显微成像,都取得了阶段性成果。展望未来的工作,可以深入研究NV色心量子传感结合光学超分辨成像的技术,以及该技术在生物学和材料学上的应用,从而进行交叉学科研究。
[Abstract]:In recent years, with the mastery of synthetic monocrystalline monocrystalline diamond technology, the optical engineering of diamond mainly includes the research of diamond based nanotechnology. And it is based on the research of NV color center in diamond. In the field of quantum information technology and quantum precision measurement, NV color centers have been widely used in the field of quantum information technology and quantum precision measurement, because they have the characteristics of stable photon emission and long decoherence time at room temperature. The electron spin state of the NV color center can provide one of the promising solid qubits for quantum computing. In addition, the NV color center can be used as an electromagnetic field. Nanosensor for temperature and pressure, because the quantum states of electron spin are very sensitive to the external environment. This has been applied well in biology and so on. The main achievements are as follows: 1.Using semiconductor technology and finite element simulation as the main means, the fabrication of single photon source devices based on the NV color center of bulk diamond is studied. Several kinds of micro and nano devices are successfully fabricated, including nanowires, nanowires, nanowires, nanowires, nanowires, nanowires, nanowires, and nanowires. Solid immersion lens, circular target ring grating, A single NV color center was also fabricated on bulk diamond and nanowires, respectively. Thus, the work and experience of nanocrystalline diamond fabrication based on bulk diamond materials were obtained. 2. NV color center single photon source is experimentally analyzed. It is proved that the cone-shaped nanowires can increase the single-photon collection efficiency of NV color center by 7 times compared with the bulk diamond. And the single-photon counting rate can be up to 564kcps. this kind of nanowire single-photon device with high photon flux can be used to improve the performance of quantum information processing. It can also provide an effective solution for nanoscale sensing and measurement. Optical far-field microscope technology based on NV color center in bulk diamond to detect local optical field is presented. Super-resolution imaging of diamond surface microstructures is realized. The dense NV color center array in bulk diamond is used as a near-field optical probe. The local light field is transmitted through the nano-structure on the diamond surface. And the charge state conversion of NV color center can be used to measure the position of the center of nitrogen with a spatial resolution of 6.1 nm, and the charge state loss nanotechnology can be used to measure the position of the center. The nanostructures on diamond surfaces are also imaged at resolutions below the optical diffraction limit. The results provide a method for constructing general optical superresolution microscopy and are used for high spatial resolution of NV color centers. The convenient platform for sensing. 4. through the simulation of microwave devices, Optimization, processing and encapsulation research provide nanosensor integrated with high quality factor microwave antenna for optical far-field super-resolution microscope technology based on NV color center quantum sensor. This paper also explains the application of artificial intelligence technology such as computer vision in experimental detection and sample preparation, and the open source programs provide reference and technical accumulation for other similar research work. It is a multi-angle research on NV color center nanosensor. In this paper, whether it is the research of nanometer-sized sensor or the study of nano-micro imaging of the target, Looking forward to the future work, we can further study the NV color center quantum sensor combined with optical super-resolution imaging technology, and its application in biology and materials, so as to carry out cross-disciplinary research.
【学位授予单位】：中国科学技术大学
【学位级别】：博士
【学位授予年份】：2017
【分类号】：TB383.1;TP212

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