高分辨力分光瞳差动共聚焦传感技术研究

发布时间：2018-03-30 00:03

本文选题：共聚焦　切入点：分光瞳　出处：《仪器仪表学报》2017年09期

【摘要】：为了提高现有共聚焦传感技术的轴向分辨力、实现微观形貌的高精度测量,在提出分光瞳差动共聚焦传感技术的基础上,对其关键参数优化理论进行了进一步研究,并研制了一种具有最优参数的分光瞳差动共聚焦显微传感器,其融合了分光瞳差动共聚焦显微技术和基于可编辑探测器件的虚拟针孔技术,利用探测区域偏移可使分光瞳共聚焦显微技术轴向特性曲线产生相移这一特性,沿特定方向在探测面上对称设置两个虚拟针孔,通过探测它们的强度响应并进行差动处理实现高轴向分辨力、高定位精度测量。对所研制的传感器进行了轴向响应特性及传感器非线性验证,给出了其轴向相对位移测量公式,还利用所研传感器对实际的高度标准样品进行了测量,经实验验证,所研传感器轴向分辨力可达5 nm,横向分辨力为0.82μm,为微细结构三维表面的高精度测量提供了一种新的传感技术及系统。
[Abstract]:In order to improve the axial resolution of confocal sensor technology, realize the high precision measurement of micro topography, based on proposed pupil differential confocal sensor technology, the key parameter optimization theory was further studied, and developed a pupil with optimum parameters into differential confocal sensor, the the fusion of pupil differential confocal microscopy and detection device based on programmable virtual pinhole technology, the detection area can be divided into offset pupil confocal technique characteristics of micro axial curve of phase shift this characteristic, along a particular direction in the detection surface symmetrically arranged on the two virtual pinhole, by detecting their response strength and differential treatment to achieve high axial resolution, high positioning accuracy measurement. The sensor nonlinear characteristics and verification of axial response of the designed sensor, gives the axial The relative displacement measurement formula, by research on the actual sensor height standard samples were measured and verified by experiment, the research of sensor axial resolution of 5 nm, the lateral resolution is 0.82 m, provides a new sensing technology and system for high precision measurement of 3D surface micro structure.

【作者单位】：北京信息科技大学光电测试技术北京市重点实验室;北京信息科技大学生物医学检测技术及仪器北京实验室;北京理工大学光电学院;
【基金】：国家自然科学基金重点项目(51535002) 教育部“长江学者和创新团队”发展计划(IRT-16R07) 北京市自然科学基金青年项目(4164084) 北京市教育委员会科技计划一般项目(KM201611232006)资助
【分类号】：TH742;TP212

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