面向物联网应用的温湿压无线无源传感器研究

发布时间：2018-04-20 20:02

本文选题：LTCC + 无线无源　；参考：《中北大学》2017年硕士论文

【摘要】：本文针对物联网智能工业、智能农业等相关领域不同环境条件下多参数测试需求及传感器低成本、微型化、低功耗和多功能的发展趋势,提出一种以电容-电感谐振式(LC)互感耦合无线测试技术为理论基础,基于LTCC工艺的无源功能集成化(压力、温度、湿度)传感器,通过合理的结构设计和工艺方法,实现了传感器多参数单片集成测量,从技术角度为多参数实时监测提供一种解决方案。首先介绍了无源传感器无线测试的原理,然后分别介绍了三参数传感器的压力敏感机理、温度敏感机理和湿度敏感机理。综合考虑了电感值和电容值对传感器性能的影响,根据相关设计经验,考虑工艺的可实行性,在合理范围内确定了电感和电容值。多参数传感器整体结构较为复杂,通过合理布局电容电感位置,最大程度的提高了各传感器的灵敏度。最后对基底材料、叉指电极材料及感湿介质进行了比较,选取最符合要求的材料用于传感器的设计与制备。然后通过软件仿真分别对单参数传感器和集成多参数于一体的传感器进行了电磁学仿真,通过两者结果的对比,说明了多参数传感器设计中存在的难点,同时也验证了多参数传感器设计的可行性,确定了多参数传感器加工尺寸。接着对传感器进行热、力学仿真,得到了传感器所能承受的最大应力和最大敏感膜形变量,证明了传感器整体能够实现均匀受热。在此基础上,首先制备了HTCC陶瓷基单参数无源湿度传感器,然后采用LTCC工艺实现了温湿压三参数传感器单片集成制备。最后对制备的无源传感器进行了相应地测试与性能分析。为了验证湿度传感器可行性,首先对无线无源单参数湿度传感器进行了初步测试,实验结果表明湿度传感器具有良好的湿度响应,为接下来的无线无源三参数传感器测试提供良好的实验基础。接着对多参数传感器进行了温压复合环境和温湿复合环境下的测试,通过实验得出,温度参数不仅对温度传感器有影响,还会干扰湿度和压力传感器信号。湿度和压力参数的变化只会引起各自传感器的频率变化,对其他参数的传感器影响可忽略不计。
[Abstract]:This paper aims at the development trend of low cost, miniaturization, low power consumption and multifunction of sensors in the fields of Internet of things intelligent industry, intelligent agriculture and other related fields under different environmental conditions. Based on the theory of capacitance-inductance coupling wireless testing technology, a passive functional integrated (pressure, temperature, humidity) sensor based on LTCC process is proposed. The sensor multi-parameter monolithic integrated measurement is realized, and a solution for multi-parameter real-time monitoring is provided from the technical point of view. Firstly, the principle of passive sensor wireless testing is introduced, and then the three parameter sensor's pressure sensitive mechanism, temperature sensitive mechanism and humidity sensitive mechanism are introduced respectively. The effects of inductance and capacitance on the performance of the sensor are considered synthetically. The inductance and capacitance are determined within a reasonable range according to the relevant design experience and the practicability of the process. The whole structure of multi-parameter sensor is more complex, and the sensitivity of each sensor is improved to the greatest extent by rationally arranging the position of capacitance inductor. Finally, the substrate material, interDigital electrode material and humidity sensitive medium are compared, and the most suitable materials are selected for the design and fabrication of the sensor. Then, the electromagnetic simulation of single parameter sensor and integrated multi-parameter sensor is carried out by software simulation, and the difficulties in the design of multi-parameter sensor are explained by the comparison of the two results. At the same time, the feasibility of the design of multi-parameter sensor is verified, and the machining size of multi-parameter sensor is determined. Then the thermal and mechanical simulation of the sensor is carried out, and the maximum stress and the maximum sensitive film shape are obtained, which proves that the whole sensor can be uniformly heated. On this basis, HTCC ceramic based single parameter passive humidity sensor was fabricated firstly, and then the monolithic integrated fabrication of temperature, humidity and pressure three-parameter sensor was realized by LTCC process. Finally, the passive sensor is tested and its performance is analyzed. In order to verify the feasibility of the humidity sensor, a preliminary test of the wireless passive single parameter humidity sensor is carried out. The experimental results show that the humidity sensor has a good humidity response. It provides a good experimental basis for the following wireless passive three-parameter sensor test. Then, the multi-parameter sensor is tested in the environment of temperature and humidity. The results show that the temperature parameter not only affects the temperature sensor, but also interferes with the signal of humidity and pressure sensor. The change of humidity and pressure parameters will only cause the frequency change of the sensor, and the influence on the other parameters can be ignored.
【学位授予单位】：中北大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TP212

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